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A platform for research: civil engineering, architecture and urbanism
IZO ceramic target material and preparation method thereof
The invention discloses an IZO ceramic target material and a preparation method thereof. The preparation method of the IZO ceramic target material comprises the following steps: uniformly mixing indium oxide powder, zinc oxide powder and tin oxide powder in deionized water according to a set mass ratio to obtain mixed slurry with the solid content of 30-60%; adding a dispersing agent into the mixed slurry, stirring, grinding, then adding a binder, and carrying out spray granulation to form IZO composite powder; mixing a set amount of IZO composite powder with an acetic acid solution to obtain IZO composite slurry; carrying out cold sintering on the IZO composite slurry to obtain an IZO green body; and carrying out low-temperature heat treatment on the IZO green body in a non-pressure oxygen atmosphere to obtain the IZO ceramic target material. According to the preparation method disclosed by the embodiment of the invention, the preparation process is simplified, the IZO ceramic target material with high density, fine particle size and low resistivity can be obtained at lower sintering temperature and lower sintering time, the problem of oxygen loss in oxide sintering is solved, and the obtained IZO ceramic target material is uniform in component and not easy to crack and has a good industrial application prospect.
本发明公开了一种IZO陶瓷靶材及其制备方法。IZO陶瓷靶材的制备方法包括：将氧化铟粉末、氧化锌粉末和氧化锡粉末按照设定质量比在去离子水中混合均匀，得到固含量为30～60％的混合浆料；向混合浆料中加入分散剂，搅拌、研磨，然后再加入粘结剂，喷雾造粒形成IZO复合粉末；取设定量的IZO复合粉末与乙酸溶液混合，得到IZO复合浆料；将IZO复合浆料进行冷烧结，得到IZO坯体；将IZO坯体在无压氧气气氛下进行低温热处理，得到IZO陶瓷靶材。本发明实施例公开的制备方法，简化了制备工艺，能够在较低烧结温度和较低烧结时间下得到高致密度、细粒径、低电阻率的IZO陶瓷靶材，解决了氧化物烧结失氧的问题，得到的IZO陶瓷靶材成分均匀，不易开裂，具有良好的工业应用前景。
IZO ceramic target material and preparation method thereof
The invention discloses an IZO ceramic target material and a preparation method thereof. The preparation method of the IZO ceramic target material comprises the following steps: uniformly mixing indium oxide powder, zinc oxide powder and tin oxide powder in deionized water according to a set mass ratio to obtain mixed slurry with the solid content of 30-60%; adding a dispersing agent into the mixed slurry, stirring, grinding, then adding a binder, and carrying out spray granulation to form IZO composite powder; mixing a set amount of IZO composite powder with an acetic acid solution to obtain IZO composite slurry; carrying out cold sintering on the IZO composite slurry to obtain an IZO green body; and carrying out low-temperature heat treatment on the IZO green body in a non-pressure oxygen atmosphere to obtain the IZO ceramic target material. According to the preparation method disclosed by the embodiment of the invention, the preparation process is simplified, the IZO ceramic target material with high density, fine particle size and low resistivity can be obtained at lower sintering temperature and lower sintering time, the problem of oxygen loss in oxide sintering is solved, and the obtained IZO ceramic target material is uniform in component and not easy to crack and has a good industrial application prospect.
本发明公开了一种IZO陶瓷靶材及其制备方法。IZO陶瓷靶材的制备方法包括：将氧化铟粉末、氧化锌粉末和氧化锡粉末按照设定质量比在去离子水中混合均匀，得到固含量为30～60％的混合浆料；向混合浆料中加入分散剂，搅拌、研磨，然后再加入粘结剂，喷雾造粒形成IZO复合粉末；取设定量的IZO复合粉末与乙酸溶液混合，得到IZO复合浆料；将IZO复合浆料进行冷烧结，得到IZO坯体；将IZO坯体在无压氧气气氛下进行低温热处理，得到IZO陶瓷靶材。本发明实施例公开的制备方法，简化了制备工艺，能够在较低烧结温度和较低烧结时间下得到高致密度、细粒径、低电阻率的IZO陶瓷靶材，解决了氧化物烧结失氧的问题，得到的IZO陶瓷靶材成分均匀，不易开裂，具有良好的工业应用前景。
IZO ceramic target material and preparation method thereof
IZO陶瓷靶材及其制备方法
WANG ZHIJUN (author) / XUE JIANSHE (author) / WANG MENGDI (author) / SUN BENSHUANG (author) / LIU MIAO (author) / WANG CHENGDUO (author) / CHEN JIE (author) / LIU YANG (author) / ZENG XUEYUN (author)
2024-10-11
Patent
Electronic Resource
Chinese
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