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Pyrolysis porous graphite coating for SiC crystal surface and preparation method thereof
The invention discloses a pyrolysis porous graphite coating for a SiC crystal surface and a preparation method of the pyrolysis porous graphite coating, and belongs to the technical field of carbon material preparation, and the preparation method comprises the following steps: mixing a cleaned silicon carbide crystal, nickel salt and a composite precursor, and performing high-temperature carbonization to obtain a modified SiC crystal; the modified SiC crystals are placed in a pyrolyzing furnace, methane and argon are introduced, a pyrolytic deposition reaction is conducted, cooling is conducted, and the modified SiC crystals obtained after pyrolysis are obtained; and polishing, grinding and cleaning the pyrolyzed modified SiC crystal to obtain the pyrolyzed porous graphite coating. Metal carbide nickel carbide formed by nano iron-nickel particles has a high melting temperature, a uniform and ordered step-shaped structure with the height of about nanometer magnitude is formed on the surface of a silicon carbide crystal, and good roughness is shown; the net-shaped carbon layer serves as a buffer layer, plays a transition role between the silicon carbide substrate and the surface pyrolysis porous graphite, and improves the lattice matching degree between the pyrolysis porous graphite and silicon carbide crystals.
本发明公开了一种SiC晶体表面用热解多孔石墨涂层及其制备方法，属于碳材料制备技术领域，制备方法包括如下步骤：将清洗后的碳化硅晶体、镍盐和复合前驱体混合，经高温碳化，得到改性SiC晶体；将改性SiC晶体置于热解炉中，通入甲烷和氩气，进行热解沉积反应，冷却，得到热解后的改性SiC晶体；热解后的改性SiC晶体经抛光、打磨、清洗后，得到热解多孔石墨涂层。纳米铁镍颗粒形成金属碳化物碳化镍具有较高的熔融温度，在碳化硅晶体表面形成均匀有序、高度约为纳米量级的台阶状结构，显示出较好的粗糙度；网状碳层作为缓冲层，起到碳化硅衬底与表面热解多孔石墨间的过渡作用，提高热解多孔石墨与碳化硅晶体间的晶格匹配度。
Pyrolysis porous graphite coating for SiC crystal surface and preparation method thereof
The invention discloses a pyrolysis porous graphite coating for a SiC crystal surface and a preparation method of the pyrolysis porous graphite coating, and belongs to the technical field of carbon material preparation, and the preparation method comprises the following steps: mixing a cleaned silicon carbide crystal, nickel salt and a composite precursor, and performing high-temperature carbonization to obtain a modified SiC crystal; the modified SiC crystals are placed in a pyrolyzing furnace, methane and argon are introduced, a pyrolytic deposition reaction is conducted, cooling is conducted, and the modified SiC crystals obtained after pyrolysis are obtained; and polishing, grinding and cleaning the pyrolyzed modified SiC crystal to obtain the pyrolyzed porous graphite coating. Metal carbide nickel carbide formed by nano iron-nickel particles has a high melting temperature, a uniform and ordered step-shaped structure with the height of about nanometer magnitude is formed on the surface of a silicon carbide crystal, and good roughness is shown; the net-shaped carbon layer serves as a buffer layer, plays a transition role between the silicon carbide substrate and the surface pyrolysis porous graphite, and improves the lattice matching degree between the pyrolysis porous graphite and silicon carbide crystals.
本发明公开了一种SiC晶体表面用热解多孔石墨涂层及其制备方法，属于碳材料制备技术领域，制备方法包括如下步骤：将清洗后的碳化硅晶体、镍盐和复合前驱体混合，经高温碳化，得到改性SiC晶体；将改性SiC晶体置于热解炉中，通入甲烷和氩气，进行热解沉积反应，冷却，得到热解后的改性SiC晶体；热解后的改性SiC晶体经抛光、打磨、清洗后，得到热解多孔石墨涂层。纳米铁镍颗粒形成金属碳化物碳化镍具有较高的熔融温度，在碳化硅晶体表面形成均匀有序、高度约为纳米量级的台阶状结构，显示出较好的粗糙度；网状碳层作为缓冲层，起到碳化硅衬底与表面热解多孔石墨间的过渡作用，提高热解多孔石墨与碳化硅晶体间的晶格匹配度。
Pyrolysis porous graphite coating for SiC crystal surface and preparation method thereof
一种SiC晶体表面用热解多孔石墨涂层及其制备方法
BAO QINGYUN (author) / LIU DONGLIANG (author) / XU YANG (author) / XU CHAO (author)
2024-10-25
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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