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Polymer precursor ceramic film and cutting force sensor
The invention belongs to the field of cutting force sensors, and relates to a polymer precursor ceramic film and a cutting force sensor.The preparation method of the polymer precursor ceramic film comprises the steps that 1, a PSN solution, SiCN powder and TiSi2 powder are weighed according to the mass ratio of 1: 1: (0.9-1.1) and mixed to obtain slurry; (2) stirring the slurry obtained in the step (1) in a nitrogen atmosphere until the slurry is uniformly mixed; 3) pouring the uniformly mixed slurry into a mold, and flattening the slurry in the mold; 4) putting the mold containing the slurry into a drying oven to promote the slurry to be completely cured; and 5) putting the cured whole into a high-temperature furnace, and pyrolyzing in a nitrogen atmosphere to obtain the polymer precursor ceramic film. The invention provides the polymer precursor ceramic film which is miniaturized and has good sensing performance and the cutting force sensor.
本发明属于切削力传感器领域，涉及一种聚合物先驱体陶瓷薄膜及切削力传感器，其中，聚合物先驱体陶瓷薄膜的制备方法包括：1)按照质量比1：1：0.9～1.1分别称取PSN溶液、SiCN粉体以及TiSi2粉体，混合后得到浆料；2)将步骤1)获取得到的浆料在氮气气氛中搅拌直至混合均匀；3)将混合均匀的浆料浇注模具中，并对模具中的浆料摊平；4)将含有浆料的模具放入烘箱中，促使浆料完全固化；5)将固化后的整体放入高温炉中，于氮气气氛下热解得到聚合物先驱体陶瓷薄膜。本发明提供了一种小型化以及具有良好的传感性能的聚合物先驱体陶瓷薄膜及切削力传感器。
Polymer precursor ceramic film and cutting force sensor
The invention belongs to the field of cutting force sensors, and relates to a polymer precursor ceramic film and a cutting force sensor.The preparation method of the polymer precursor ceramic film comprises the steps that 1, a PSN solution, SiCN powder and TiSi2 powder are weighed according to the mass ratio of 1: 1: (0.9-1.1) and mixed to obtain slurry; (2) stirring the slurry obtained in the step (1) in a nitrogen atmosphere until the slurry is uniformly mixed; 3) pouring the uniformly mixed slurry into a mold, and flattening the slurry in the mold; 4) putting the mold containing the slurry into a drying oven to promote the slurry to be completely cured; and 5) putting the cured whole into a high-temperature furnace, and pyrolyzing in a nitrogen atmosphere to obtain the polymer precursor ceramic film. The invention provides the polymer precursor ceramic film which is miniaturized and has good sensing performance and the cutting force sensor.
本发明属于切削力传感器领域，涉及一种聚合物先驱体陶瓷薄膜及切削力传感器，其中，聚合物先驱体陶瓷薄膜的制备方法包括：1)按照质量比1：1：0.9～1.1分别称取PSN溶液、SiCN粉体以及TiSi2粉体，混合后得到浆料；2)将步骤1)获取得到的浆料在氮气气氛中搅拌直至混合均匀；3)将混合均匀的浆料浇注模具中，并对模具中的浆料摊平；4)将含有浆料的模具放入烘箱中，促使浆料完全固化；5)将固化后的整体放入高温炉中，于氮气气氛下热解得到聚合物先驱体陶瓷薄膜。本发明提供了一种小型化以及具有良好的传感性能的聚合物先驱体陶瓷薄膜及切削力传感器。
Polymer precursor ceramic film and cutting force sensor
聚合物先驱体陶瓷薄膜及切削力传感器
SHAO GANG (author) / WANG CHANG (author) / MA CHAO (author) / HAN DAOYANG (author) / WANG HAILONG (author) / ZHANG RUI (author)
2024-11-22
Patent
Electronic Resource
Chinese
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