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A platform for research: civil engineering, architecture and urbanism
Porous tantalum carbide ceramic as well as preparation method and application thereof
The invention belongs to the technical field of material preparation. The invention provides a porous tantalum carbide ceramic as well as a preparation method and application thereof, the preparation method comprises the following steps: mixing tantalum powder and/or tantalum carbide powder with tantalum salt and an organic ligand source in a liquid phase system, rapidly cooling to form a solid, vacuumizing and sintering the obtained solid, and carbonizing to obtain the porous tantalum carbide ceramic. According to the preparation method, an organic ligand source provides a ligand, so that the ligand and tantalum form a metal organic framework structure, pores and distribution are adjusted, pore forming is realized through further decomposition or volatilization at a high temperature, and finally, the prepared porous silicon carbide ceramic has disordered micron-sized pores, and when the porous silicon carbide ceramic is applied to preparation of single crystal silicon carbide through a physical vapor deposition method, the pore forming efficiency is improved. Compared with a traditional graphite material, the graphite material can allow gaseous substances generated by silicon carbide to pass through, is resistant to high temperature and high in strength, does not participate in reaction, does not generate impurities entering crystals or forming carbon wrapping and the like, and effectively achieves the filtering effect.
本发明属于材料制备技术领域。本发明提供了一种多孔碳化钽陶瓷及其制备方法与应用，所述的制备方法包括将钽粉和/或碳化钽粉与钽盐及有机配体源在液相体系混合后通过快速降温形成固体，将所得固体进行抽真空烧结后再进行碳化，得到多孔碳化钽陶瓷。所述制备方法中有机配体源提供配体，使配体与钽形成金属有机框架结构，调节孔隙和分布，并进一步在高温下的分解或挥发而实现造孔，最终制备得到的多孔碳化硅陶瓷中具有无序的微米级孔，应用于物理气相沉积法制备单晶碳化硅时，相比于传统的石墨材料，既能允许碳化硅产生的气态物质通过，又能耐高温，且强度高、不参与反应，不产生杂质进入晶体或形成碳包裹等缺陷，有效实现过滤作用。
Porous tantalum carbide ceramic as well as preparation method and application thereof
The invention belongs to the technical field of material preparation. The invention provides a porous tantalum carbide ceramic as well as a preparation method and application thereof, the preparation method comprises the following steps: mixing tantalum powder and/or tantalum carbide powder with tantalum salt and an organic ligand source in a liquid phase system, rapidly cooling to form a solid, vacuumizing and sintering the obtained solid, and carbonizing to obtain the porous tantalum carbide ceramic. According to the preparation method, an organic ligand source provides a ligand, so that the ligand and tantalum form a metal organic framework structure, pores and distribution are adjusted, pore forming is realized through further decomposition or volatilization at a high temperature, and finally, the prepared porous silicon carbide ceramic has disordered micron-sized pores, and when the porous silicon carbide ceramic is applied to preparation of single crystal silicon carbide through a physical vapor deposition method, the pore forming efficiency is improved. Compared with a traditional graphite material, the graphite material can allow gaseous substances generated by silicon carbide to pass through, is resistant to high temperature and high in strength, does not participate in reaction, does not generate impurities entering crystals or forming carbon wrapping and the like, and effectively achieves the filtering effect.
本发明属于材料制备技术领域。本发明提供了一种多孔碳化钽陶瓷及其制备方法与应用，所述的制备方法包括将钽粉和/或碳化钽粉与钽盐及有机配体源在液相体系混合后通过快速降温形成固体，将所得固体进行抽真空烧结后再进行碳化，得到多孔碳化钽陶瓷。所述制备方法中有机配体源提供配体，使配体与钽形成金属有机框架结构，调节孔隙和分布，并进一步在高温下的分解或挥发而实现造孔，最终制备得到的多孔碳化硅陶瓷中具有无序的微米级孔，应用于物理气相沉积法制备单晶碳化硅时，相比于传统的石墨材料，既能允许碳化硅产生的气态物质通过，又能耐高温，且强度高、不参与反应，不产生杂质进入晶体或形成碳包裹等缺陷，有效实现过滤作用。
Porous tantalum carbide ceramic as well as preparation method and application thereof
一种多孔碳化钽陶瓷及其制备方法与应用
YUAN ZHENZHOU (author) / LIU XINYU (author)
2024-12-10
Patent
Electronic Resource
Chinese
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