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Method for preparing high-toughness silicon carbide ceramic material and application
The invention provides the method for preparing the high-toughness silicon carbide ceramic material, and the high-toughness silicon carbide ceramic material prepared by the method can have high purity and high toughness, so that the requirement of wafer epitaxial growth or silicon carbide etching on the high purity of the silicon carbide ceramic material can be met; and more shapes can be manufactured by utilizing the excellent toughness and processability of the composite material, so that the requirements of various application scenes are met.
本发明提供了一种制备高韧性碳化硅陶瓷材料的方法，通过本发明方法制备得到的高韧性碳化硅陶瓷材料能够具有高纯度和高韧性，既可以满足晶圆外延生长或碳化硅刻蚀对碳化硅陶瓷材料高纯度的要求，也可利用其优异的韧性及加工性制作出更多的形状，从而满足各种应用场景的需求。
Method for preparing high-toughness silicon carbide ceramic material and application
The invention provides the method for preparing the high-toughness silicon carbide ceramic material, and the high-toughness silicon carbide ceramic material prepared by the method can have high purity and high toughness, so that the requirement of wafer epitaxial growth or silicon carbide etching on the high purity of the silicon carbide ceramic material can be met; and more shapes can be manufactured by utilizing the excellent toughness and processability of the composite material, so that the requirements of various application scenes are met.
本发明提供了一种制备高韧性碳化硅陶瓷材料的方法，通过本发明方法制备得到的高韧性碳化硅陶瓷材料能够具有高纯度和高韧性，既可以满足晶圆外延生长或碳化硅刻蚀对碳化硅陶瓷材料高纯度的要求，也可利用其优异的韧性及加工性制作出更多的形状，从而满足各种应用场景的需求。
Method for preparing high-toughness silicon carbide ceramic material and application
一种制备高韧性碳化硅陶瓷材料的方法和应用
LIAO JIAHAO (author) / DAI HENG (author) / WANG FEI (author) / CHAI PAN (author) / WAN QIANG (author)
2024-12-13
Patent
Electronic Resource
Chinese
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