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CERAMIC MEMBER, PROBE HOLDER, AND METHOD FOR PRODUCING CERAMIC MEMBER
Provided are a ceramic member being a sintered body including at least forsterite and boron nitride as major components, and in which the boron nitride is oriented in one direction, a probe holder formed by using the ceramic member, and a method for manufacturing the ceramic member. In the ceramic member, the index of orientation preference is equal to or lower than 0.07, and the coefficient of thermal expansion at 20 to 300°C in a direction parallel to the direction of orientation is (3 to 5)×10 -6 /°C, or the three-point bending strength based on JIS R 1601 is equal to or higher than 250 MPa.
CERAMIC MEMBER, PROBE HOLDER, AND METHOD FOR PRODUCING CERAMIC MEMBER
Provided are a ceramic member being a sintered body including at least forsterite and boron nitride as major components, and in which the boron nitride is oriented in one direction, a probe holder formed by using the ceramic member, and a method for manufacturing the ceramic member. In the ceramic member, the index of orientation preference is equal to or lower than 0.07, and the coefficient of thermal expansion at 20 to 300°C in a direction parallel to the direction of orientation is (3 to 5)×10 -6 /°C, or the three-point bending strength based on JIS R 1601 is equal to or higher than 250 MPa.
CERAMIC MEMBER, PROBE HOLDER, AND METHOD FOR PRODUCING CERAMIC MEMBER
KERAMIKELEMENT, SONDENHALTER UND VERFAHREN ZUR HERSTELLUNG DES KERAMIKELEMENTS
ÉLÉMENT CÉRAMIQUE, SUPPORT DE SONDE ET PROCÉDÉ DE FABRICATION D'ÉLÉMENT CÉRAMIQUE
SUZUKI KOHEI (author) / MIYAJI SHINYA (author) / SAITO SHINJI (author) / KANEDA NORIYOSHI (author)
2018-05-30
Patent
Electronic Resource
English
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