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CERAMIC MEMBER, HOLDING DEVICE, AND METHOD OF PRODUCING CERAMIC MEMBER
To provide a ceramic member hardly generating a crack at a joint part of a power feeder terminal and a terminal pad thereof, a holding device, and a method of producing a ceramic member.SOLUTION: A ceramic member 5 comprises a ceramic substrate 10 comprising an inner electrode 48 and a terminal pad 42, and a power feeder terminal 40 extending in a first direction D1 from outside of the ceramic substrate 10 and jointed to the terminal pad 42, which ceramic substrate 10 comprises an inner cavity 16 with the terminal pad 42 disposed therein, and a communication hole 17 opening to the surface 12 of the ceramic substrate 10 to communicate the outside of the ceramic substrate 10 and the inner cavity 16, with the power feeder terminal 40 being inserted into the communication hole 17. The outer periphery 17b of the communication hole 17 is positioned inside the outer periphery 16b of the inner cavity 16, in the plan view of the ceramic substrate 10 in the first direction D1.SELECTED DRAWING: Figure 3
【課題】給電端子と端子パッドとの接合部分に亀裂が発生し難いセラミックス部材、保持装置、及びセラミックス部材の製造方法を提供する。【解決手段】内部電極４８及び端子パッド４２を有するセラミックス基板１０と、セラミックス基板１０の外部から第１方向Ｄ１に延び、端子パッド４２に接合された給電端子４０とを備えるセラミックス部材５において、セラミックス基板１０は、端子パッド４２が配置された内部空洞１６と、セラミックス基板１０の表面１２に開口し、セラミックス基板１０の外部と内部空洞１６とを連通する連通孔１７であって、給電端子４０が挿入される連通孔１７とを備える。セラミックス基板１０を第１方向Ｄ１に平面視したときに、連通孔１７の外周１７ｂが内部空洞１６の外周１６ｂよりも内側に位置している。【選択図】図３
CERAMIC MEMBER, HOLDING DEVICE, AND METHOD OF PRODUCING CERAMIC MEMBER
To provide a ceramic member hardly generating a crack at a joint part of a power feeder terminal and a terminal pad thereof, a holding device, and a method of producing a ceramic member.SOLUTION: A ceramic member 5 comprises a ceramic substrate 10 comprising an inner electrode 48 and a terminal pad 42, and a power feeder terminal 40 extending in a first direction D1 from outside of the ceramic substrate 10 and jointed to the terminal pad 42, which ceramic substrate 10 comprises an inner cavity 16 with the terminal pad 42 disposed therein, and a communication hole 17 opening to the surface 12 of the ceramic substrate 10 to communicate the outside of the ceramic substrate 10 and the inner cavity 16, with the power feeder terminal 40 being inserted into the communication hole 17. The outer periphery 17b of the communication hole 17 is positioned inside the outer periphery 16b of the inner cavity 16, in the plan view of the ceramic substrate 10 in the first direction D1.SELECTED DRAWING: Figure 3
【課題】給電端子と端子パッドとの接合部分に亀裂が発生し難いセラミックス部材、保持装置、及びセラミックス部材の製造方法を提供する。【解決手段】内部電極４８及び端子パッド４２を有するセラミックス基板１０と、セラミックス基板１０の外部から第１方向Ｄ１に延び、端子パッド４２に接合された給電端子４０とを備えるセラミックス部材５において、セラミックス基板１０は、端子パッド４２が配置された内部空洞１６と、セラミックス基板１０の表面１２に開口し、セラミックス基板１０の外部と内部空洞１６とを連通する連通孔１７であって、給電端子４０が挿入される連通孔１７とを備える。セラミックス基板１０を第１方向Ｄ１に平面視したときに、連通孔１７の外周１７ｂが内部空洞１６の外周１６ｂよりも内側に位置している。【選択図】図３
CERAMIC MEMBER, HOLDING DEVICE, AND METHOD OF PRODUCING CERAMIC MEMBER
セラミックス部材、保持装置、及びセラミックス部材の製造方法
TANAKA KAZUTAKA (author) / KOMATSU TAKAHISA (author) / TSUJITA MASAO (author)
2022-02-07
Patent
Electronic Resource
Japanese
IPC:
C04B
Kalk
,
LIME
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