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COMPOSITE OXIDE SINTERED BODY AND TRANSPARENT CONDUCTIVE OXIDE FILM
To provide a composite oxide sintered body from which an oxide transparent conductive film having lower light absorption properties in a wide wavelength region and having a low resistance can be obtained, and an oxide transparent conductive film. A composite oxide sintered body containing indium, zirconium, hafnium and oxygen, wherein the atomic ratio of the elements constituting the sintered body satisfies the following formulae, where In, Zr and Hf are respectively contents of indium, zirconium and hafnium: Zr / ln + Zr + Hf = 0.05 to 4.5 at % Hf / ln + Zr + Hf = 0.0002 to 0.15 at %
COMPOSITE OXIDE SINTERED BODY AND TRANSPARENT CONDUCTIVE OXIDE FILM
To provide a composite oxide sintered body from which an oxide transparent conductive film having lower light absorption properties in a wide wavelength region and having a low resistance can be obtained, and an oxide transparent conductive film. A composite oxide sintered body containing indium, zirconium, hafnium and oxygen, wherein the atomic ratio of the elements constituting the sintered body satisfies the following formulae, where In, Zr and Hf are respectively contents of indium, zirconium and hafnium: Zr / ln + Zr + Hf = 0.05 to 4.5 at % Hf / ln + Zr + Hf = 0.0002 to 0.15 at %
COMPOSITE OXIDE SINTERED BODY AND TRANSPARENT CONDUCTIVE OXIDE FILM
MISCHOXIDSINTERKÖRPER UND LEITFÄHIGER TRANSPARENTER OXIDFILM
CORPS FRITTÉ D'OXYDE COMPOSITE ET FILM D'OXYDE CONDUCTEUR TRANSPARENT
KURAMOCHI HIDETO (author) / TAMANO KIMIAKI (author) / AKIIKE RYO (author) / IIGUSA HITOSHI (author)
2019-01-02
Patent
Electronic Resource
English
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