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Composite oxide sintered body and transparent conductive oxide film
Provided are: a composite oxide sintered body which is capable of providing a transparent conductive oxide film that exhibits low light absorption characteristics over a wide wavelength range and has low resistance; and a transparent conductive oxide film. A composite oxide sintered body containing indium, zirconium, hafnium and oxygen, which is characterized in that the atomic ratio of the elements constituting the sintered body satisfies the following formulae, where In, Zr and Hf respectively represent the contents of indium, zirconium and hafnium. Zr/(In + Zr + Hf) = 0.05-4.5 at% Hf/(In + Zr + Hf) = 0.0002-0.15 at%
Composite oxide sintered body and transparent conductive oxide film
Provided are: a composite oxide sintered body which is capable of providing a transparent conductive oxide film that exhibits low light absorption characteristics over a wide wavelength range and has low resistance; and a transparent conductive oxide film. A composite oxide sintered body containing indium, zirconium, hafnium and oxygen, which is characterized in that the atomic ratio of the elements constituting the sintered body satisfies the following formulae, where In, Zr and Hf respectively represent the contents of indium, zirconium and hafnium. Zr/(In + Zr + Hf) = 0.05-4.5 at% Hf/(In + Zr + Hf) = 0.0002-0.15 at%
Composite oxide sintered body and transparent conductive oxide film
KURAMOCHI HIDETO (author) / TAMANO KIMIAKI (author) / AKIIKE RYO (author) / IIGUSA HITOSHI (author)
2015-04-15
Patent
Electronic Resource
English
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