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METHOD FOR COATING REMOVAL
A method for removing a coating from an article (100) includes heating an article (100) to a processing temperature. The article (100) includes a first material (102) in contact with a second material (104), the first material (102) comprising silicon, and the second material (104) comprising an oxide comprising silicon. The article (100) can further comprise a third material (108) comprising an oxide disposed over the second material (104). The heating is performed in an environment having a partial pressure of oxygen that is less than an equilibrium partial pressure of oxygen for chemical equilibrium between the first material (102) and the second material (104) at the processing temperature.
METHOD FOR COATING REMOVAL
A method for removing a coating from an article (100) includes heating an article (100) to a processing temperature. The article (100) includes a first material (102) in contact with a second material (104), the first material (102) comprising silicon, and the second material (104) comprising an oxide comprising silicon. The article (100) can further comprise a third material (108) comprising an oxide disposed over the second material (104). The heating is performed in an environment having a partial pressure of oxygen that is less than an equilibrium partial pressure of oxygen for chemical equilibrium between the first material (102) and the second material (104) at the processing temperature.
METHOD FOR COATING REMOVAL
VERFAHREN ZUM ENTFERNEN VON BESCHICHTUNGEN
PROCÉDÉ D'ÉLIMINATION DE REVÊTEMENT
WAN JULIN (author) / CAO HONGBO (author)
2024-04-03
Patent
Electronic Resource
English