A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
LITHIUM COBALT SINTERED BODY AND SPUTTERING TARGET PRODUCED BY USING THE SINTERED BODY, PRODUCTION METHOD OF LITHIUM COBALT OXIDE SINTERED BODY, AND THIN FILM FORMED FROM LITHIUM COBALT OXIDE
A lithium cobalt oxide sintered body having a bending strength of 100 MPa or more, and a sputtering target formed using the sintered body. In particular, a cylindrical sputtering target for use in rotary sputtering. The sputtering target of the present invention is useful in forming a cathode material thin film in an all-solid thin film lithium ion secondary battery for use in vehicles, telecommunication equipment and household equipment.
LITHIUM COBALT SINTERED BODY AND SPUTTERING TARGET PRODUCED BY USING THE SINTERED BODY, PRODUCTION METHOD OF LITHIUM COBALT OXIDE SINTERED BODY, AND THIN FILM FORMED FROM LITHIUM COBALT OXIDE
A lithium cobalt oxide sintered body having a bending strength of 100 MPa or more, and a sputtering target formed using the sintered body. In particular, a cylindrical sputtering target for use in rotary sputtering. The sputtering target of the present invention is useful in forming a cathode material thin film in an all-solid thin film lithium ion secondary battery for use in vehicles, telecommunication equipment and household equipment.
LITHIUM COBALT SINTERED BODY AND SPUTTERING TARGET PRODUCED BY USING THE SINTERED BODY, PRODUCTION METHOD OF LITHIUM COBALT OXIDE SINTERED BODY, AND THIN FILM FORMED FROM LITHIUM COBALT OXIDE
LITHIUM-KOBALT-SINTERKÖRPER UND UNTER VERWENDUNG DES SINTERKÖRPERS HERGESTELLTES SPUTTERTARGET, HERSTELLUNGSVERFAHREN FÜR LITHIUM-KOBALTOXID-SINTERKÖRPER UND AUS LITHIUM-KOBALTOXID GEFORMTE DÜNNSCHICHT
CORPS FRITTÉ À BASE DE COBALT ET DE LITHIUM ET CIBLE DE PULVÉRISATION PRODUITE AU MOYEN DU CORPS FRITTÉ, PROCÉDÉ DE PRODUCTION D'UN CORPS FRITTÉ D'OXYDE DE COBALT ET DE LITHIUM ET FILM MINCE FORMÉ À PARTIR D'OXYDE DE COBALT ET DE LITHIUM
ENDO YOSUKE (author) / SATOH KAZUYUKI (author) / SUZUKI RYO (author)
2019-04-24
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
OXIDE SINTERED BODY AND SPUTTERING TARGET COMPRISING OXIDE SINTERED BODY
European Patent Office | 2018
OXIDE SINTERED BODY AND SPUTTERING TARGET COMPRISING OXIDE SINTERED BODY
| European Patent Office | 2016
OXIDE SINTERED BODY AND SPUTTERING TARGET COMPRISING OXIDE SINTERED BODY
| European Patent Office | 2017
SINTERED OXIDE BODY AND SPUTTERING TARGET COMPRISING SAID SINTERED OXIDE BODY
| European Patent Office | 2015
OXIDE SINTERED BODY AND SPUTTERING TARGET COMPRISING THE OXIDE SINTERED BODY
European Patent Office | 2018