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A platform for research: civil engineering, architecture and urbanism
LICOO2-CONTAINING SINTERED COMPACT, LICOO2-CONTAINING SPUTTERING TARGET, AND LICOO2-CONTAINING SINTERED COMPACT MANUFACTURING METHOD
To realize a sintered compact containing LiCoO 2 which can increase a film deposition rate during sputtering, particularly even when a film is deposited only by pulsed DC discharge sputtering and can suppress the generation of flakes due to sputtering, and which is hardly cracked and is easy to handle. In the sintered compact containing LiCoO 2 , an average grain size is 10 to 40 µm, a relative density is 90% or more, and a resistivity is 100 ©·cm or less.
LICOO2-CONTAINING SINTERED COMPACT, LICOO2-CONTAINING SPUTTERING TARGET, AND LICOO2-CONTAINING SINTERED COMPACT MANUFACTURING METHOD
To realize a sintered compact containing LiCoO 2 which can increase a film deposition rate during sputtering, particularly even when a film is deposited only by pulsed DC discharge sputtering and can suppress the generation of flakes due to sputtering, and which is hardly cracked and is easy to handle. In the sintered compact containing LiCoO 2 , an average grain size is 10 to 40 µm, a relative density is 90% or more, and a resistivity is 100 ©·cm or less.
LICOO2-CONTAINING SINTERED COMPACT, LICOO2-CONTAINING SPUTTERING TARGET, AND LICOO2-CONTAINING SINTERED COMPACT MANUFACTURING METHOD
LICOO2-HALTIGER SINTERKÖRPER, LICOO2-HALTIGES SPUTTERTARGET UND HERSTELLUNGSVERFAHREN FÜR LICOO2-HALTIGEN SINTERKÖRPER
COMPACT FRITTÉ CONTENANT DU LICOO2, CIBLE DE PULVÉRISATION CATHODIQUE CONTENANT DU LICOO2, ET PROCÉDÉ DE FABRICATION DE COMPACT FRITTÉ CONTENANT DU LICOO2
TAKETOMI YUICHI (author) / YOSHIDA SHINTARO (author) / KANAMARU MORIYOSHI (author)
2018-08-22
Patent
Electronic Resource
English
IPC:
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
C04B
Kalk
,
LIME
/
H01M
Verfahren oder Mittel, z.B. Batterien, für die direkte Umwandlung von chemischer in elektrische Energie
,
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
| European Patent Office | 2017
LiCoO2 CONTAINING SPUTTERING TARGET AND LiCoO2 CONTAINING SINTERED BODY
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LiCoO2-CONTAINING SINTERED BODY AND TUBULAR SPUTTERING TARGET
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