A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CERAMIC, PROBE-GUIDING PART, PROBE CARD AND SOCKET FOR INSPECTING PACKAGE
A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at -50 to 500°C of 1.0×10-6to 5.0×10-6/°C, is excellent in low electrostatic properties (106to 1014Ω·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.
CERAMIC, PROBE-GUIDING PART, PROBE CARD AND SOCKET FOR INSPECTING PACKAGE
A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at -50 to 500°C of 1.0×10-6to 5.0×10-6/°C, is excellent in low electrostatic properties (106to 1014Ω·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.
CERAMIC, PROBE-GUIDING PART, PROBE CARD AND SOCKET FOR INSPECTING PACKAGE
KERAMIK, SONDENFÜHRUNGSTEIL, NADELKARTE UND FASSUNG ZUR INSPEKTION VON VERPACKUNGEN
CÉRAMIQUE, PIÈCE DE GUIDAGE DE SONDE, CARTE SONDE ET DOUILLE D'INSPECTION D'EMBALLAGE
YAMAGISHI WATARU (author) / MORI KAZUMASA (author) / ETO SHUNICHI (author)
2021-08-18
Patent
Electronic Resource
English
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