A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
The present invention relates to a new process for manufacturing a silicon carbide (SiC) coated body by depositing SiC in a chemical vapor deposition method using dimethyldichlorosilane (DMS) as the silane source on a graphite substrate. A further aspect of the present invention relates to the new silicon carbide coated body, which can be obtained by the new process of the present invention, and to the use thereof for manufacturing articles for high temperature applications, susceptors and reactors, semiconductor materials, and wafer.
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
The present invention relates to a new process for manufacturing a silicon carbide (SiC) coated body by depositing SiC in a chemical vapor deposition method using dimethyldichlorosilane (DMS) as the silane source on a graphite substrate. A further aspect of the present invention relates to the new silicon carbide coated body, which can be obtained by the new process of the present invention, and to the use thereof for manufacturing articles for high temperature applications, susceptors and reactors, semiconductor materials, and wafer.
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
VERFAHREN ZUR HERSTELLUNG EINES SILICIUMCARBIDBESCHICHTETEN KÖRPERS
PROCÉDÉ DE FABRICATION D'UN CORPS REVÊTU DE CARBURE DE SILICIUM
GUERCIO PETER J (author) / WESTPHAL PAUL (author)
2020-11-04
Patent
Electronic Resource
English