A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
A CHEMICAL VAPOR DEPOSITION CHAMBER ARTICLE
The present invention relates to a chemical vapor deposition chamber article. The present invention further relates to a method of processing an article of a chemical vapor deposition chamber for manufacturing semiconductor components, as well as chemical vapor deposition chamber article obtained through such a method. In a first aspect of the invention, there is provided, a chemical vapor deposition chamber article such as a wafer carrier, for manufacturing semiconductor components, said chamber article having a body and a surface comprised of silicon carbide, characterized in that said surface is provided with a protective layer at least on parts of said surface which are subject to parasitic deposition during said manufacturing of said semiconductor components in said chamber, and wherein said protective layer comprises an oxidized surface.
A CHEMICAL VAPOR DEPOSITION CHAMBER ARTICLE
The present invention relates to a chemical vapor deposition chamber article. The present invention further relates to a method of processing an article of a chemical vapor deposition chamber for manufacturing semiconductor components, as well as chemical vapor deposition chamber article obtained through such a method. In a first aspect of the invention, there is provided, a chemical vapor deposition chamber article such as a wafer carrier, for manufacturing semiconductor components, said chamber article having a body and a surface comprised of silicon carbide, characterized in that said surface is provided with a protective layer at least on parts of said surface which are subject to parasitic deposition during said manufacturing of said semiconductor components in said chamber, and wherein said protective layer comprises an oxidized surface.
A CHEMICAL VAPOR DEPOSITION CHAMBER ARTICLE
KAMMERARTIKEL FÜR CHEMISCHE GASPHASENABSCHEIDUNG
ARTICLE DE CHAMBRE DE DÉPÔT CHIMIQUE EN PHASE VAPEUR
VAN MUNSTER MARCUS GERARDUS (author) / SONG GUIMING (author)
2022-04-06
Patent
Electronic Resource
English
| British Library Online Contents | 1999
Thermal Plasma Chemical Vapor Deposition
| British Library Online Contents | 1993
4547404 Chemical vapor deposition process
Elsevier | 1987