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    CERAMIC COMPONENT AND METHOD FOR MANUFACTURING CERAMIC COMPONENT

    New search for: HWANG SUNGSIC
    New search for: OH JUNROK
    New search for: MIN KYOUNGYEOL
    New search for: KIM KYUNGIN
    New search for: KANG JUNGKUN
    New search for: HAN YOUNGUK

    The present disclosure relates to a ceramic component and a manufacturing method of a ceramic component, and provides a ceramic component comprising boron carbide, wherein residual stress values measured at surface of two spots with different distances from a center are respectively S1 and S2, and a difference between the S1 and S2 is -600 to +600 MP. According to the present disclosure, it is possible to manufacture a ceramic component improved in the quality and simultaneously efficiently used in apparatus for manufacturing a semiconductor element.

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    CERAMIC COMPONENT AND METHOD FOR MANUFACTURING CERAMIC COMPONENT

    New search for: HWANG SUNGSIC
    New search for: OH JUNROK
    New search for: MIN KYOUNGYEOL
    New search for: KIM KYUNGIN
    New search for: KANG JUNGKUN
    New search for: HAN YOUNGUK

    The present disclosure relates to a ceramic component and a manufacturing method of a ceramic component, and provides a ceramic component comprising boron carbide, wherein residual stress values measured at surface of two spots with different distances from a center are respectively S1 and S2, and a difference between the S1 and S2 is -600 to +600 MP. According to the present disclosure, it is possible to manufacture a ceramic component improved in the quality and simultaneously efficiently used in apparatus for manufacturing a semiconductor element.

    Access

    Download

    CERAMIC COMPONENT AND METHOD FOR MANUFACTURING CERAMIC COMPONENT

    New search for: HWANG SUNGSIC
    New search for: OH JUNROK
    New search for: MIN KYOUNGYEOL
    New search for: KIM KYUNGIN
    New search for: KANG JUNGKUN
    New search for: HAN YOUNGUK

    The present disclosure relates to a ceramic component and a manufacturing method of a ceramic component, and provides a ceramic component comprising boron carbide, wherein residual stress values measured at surface of two spots with different distances from a center are respectively S1 and S2, and a difference between the S1 and S2 is -600 to +600 MP. According to the present disclosure, it is possible to manufacture a ceramic component improved in the quality and simultaneously efficiently used in apparatus for manufacturing a semiconductor element.

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    Title:

    CERAMIC COMPONENT AND METHOD FOR MANUFACTURING CERAMIC COMPONENT

    Additional title:

    KERAMISCHES BAUTEIL UND VERFAHREN ZUM HERSTELLEN EINES KERAMISCHEN BAUTEILS
    COMPOSANT CÉRAMIQUE ET PROCÉDÉ DE FABRICATION DE COMPOSANT CÉRAMIQUE

    Contributors:

    HWANG SUNGSIC (author) / OH JUNROK (author) / MIN KYOUNGYEOL (author) / KIM KYUNGIN (author) / KANG JUNGKUN (author) / HAN YOUNGUK (author)

    Publication date:

    2024-02-07

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  C04B Kalk , LIME / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

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