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A platform for research: civil engineering, architecture and urbanism
HIGH PURITY CORDIERITE MATERIAL FOR SEMICONDUCTOR APPLICATIONS
Disclosed is a cordierite sintered body comprising from 90 to 98% by volume of a cordierite crystal phase as measured using x ray diffraction, SEM and image processing methods wherein the cordierite sintered body has at least one surface comprising pores having a diameter of from 0.1 to 5 um as measured using SEM and image processing methods. The cordierite sintered body has a Young's modulus of about 125 GPa or greater, and volumetric porosity of less than about 4%. Methods of making the cordierite sintered body are also disclosed.
HIGH PURITY CORDIERITE MATERIAL FOR SEMICONDUCTOR APPLICATIONS
Disclosed is a cordierite sintered body comprising from 90 to 98% by volume of a cordierite crystal phase as measured using x ray diffraction, SEM and image processing methods wherein the cordierite sintered body has at least one surface comprising pores having a diameter of from 0.1 to 5 um as measured using SEM and image processing methods. The cordierite sintered body has a Young's modulus of about 125 GPa or greater, and volumetric porosity of less than about 4%. Methods of making the cordierite sintered body are also disclosed.
HIGH PURITY CORDIERITE MATERIAL FOR SEMICONDUCTOR APPLICATIONS
HOCHREINES CORDIERITMATERIAL FÜR HALBLEITERANWENDUNGEN
MATÉRIAU DE CORDIÉRITE DE HAUTE PURETÉ DESTINÉ AUX APPLICATIONS DE SEMI-CONDUCTEUR
WALKER LUKE (author) / BISTA SAURAV (author) / DONELON MATTHEW JOSEPH (author) / KENNEDY STEVEN ROGER (author)
2022-12-07
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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