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HIGH PURITY CORDIERITE MATERIAL FOR SEMICONDUCTOR APPLICATION
To provide a cordierite material that: has a coefficient of thermal expansion (CTE) that is substantially zero across a temperature range of operation; has a Young's Modulus of substantially greater than 130 GPa; is essentially free of pores; provides high thermal conductivity; and can be polished to a low surface roughness, and to provide a method for producing the same.SOLUTION: A cordierite sintered body comprises 90 to 98 vol.% of a cordierite crystal phase as measured using X-ray diffraction, SEM and image processing methods. The cordierite sintered body has at least one surface comprising pores having a diameter of 0.1 to 5 μm as measured using SEM and image processing methods.SELECTED DRAWING: Figure 1
【課題】動作温度範囲にわたって実質的にゼロである熱膨張係数（ＣＴＥ）を有し、実質的に１３０ＧＰａを超えるヤング率を有し、細孔を本質的に含まず、高い熱伝導率を有し、また研磨して低い表面粗さにすることができる、コーディエライト材料およびその作製方法を提供する。【解決手段】Ｘ線回折、ＳＥＭ、及び画像処理の方法を用いて測定して９０～９８体積％のコーディエライト結晶相を含むコーディエライト焼結体であって、前記コーディエライト焼結体は、ＳＥＭ及び画像処理の方法を用いて測定して、０．１～５μｍの直径を有する細孔を含む少なくとも１つの表面を有する、コーディエライト焼結体である。【選択図】図１
HIGH PURITY CORDIERITE MATERIAL FOR SEMICONDUCTOR APPLICATION
To provide a cordierite material that: has a coefficient of thermal expansion (CTE) that is substantially zero across a temperature range of operation; has a Young's Modulus of substantially greater than 130 GPa; is essentially free of pores; provides high thermal conductivity; and can be polished to a low surface roughness, and to provide a method for producing the same.SOLUTION: A cordierite sintered body comprises 90 to 98 vol.% of a cordierite crystal phase as measured using X-ray diffraction, SEM and image processing methods. The cordierite sintered body has at least one surface comprising pores having a diameter of 0.1 to 5 μm as measured using SEM and image processing methods.SELECTED DRAWING: Figure 1
【課題】動作温度範囲にわたって実質的にゼロである熱膨張係数（ＣＴＥ）を有し、実質的に１３０ＧＰａを超えるヤング率を有し、細孔を本質的に含まず、高い熱伝導率を有し、また研磨して低い表面粗さにすることができる、コーディエライト材料およびその作製方法を提供する。【解決手段】Ｘ線回折、ＳＥＭ、及び画像処理の方法を用いて測定して９０～９８体積％のコーディエライト結晶相を含むコーディエライト焼結体であって、前記コーディエライト焼結体は、ＳＥＭ及び画像処理の方法を用いて測定して、０．１～５μｍの直径を有する細孔を含む少なくとも１つの表面を有する、コーディエライト焼結体である。【選択図】図１
HIGH PURITY CORDIERITE MATERIAL FOR SEMICONDUCTOR APPLICATION
半導体用途のための高純度コーディエライト材料
LUKE WALKER (author) / SAURAV BISTA (author) / MATTHEW JOSEPH DONELON (author) / STEVEN ROGER KENNEDY (author)
2024-03-05
Patent
Electronic Resource
Japanese
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