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A platform for research: civil engineering, architecture and urbanism
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING PIEZOELECTRIC LAMINATE
There is provided a piezoelectric stack, including: a substrate; an oxide film on the substrate, containing zinc and oxygen as main elements; an electrode film on the oxide film; and a piezoelectric film on the electrode film, being an alkali niobium oxide film containing potassium, sodium, niobium, and oxygen and having a perovskite structure.
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING PIEZOELECTRIC LAMINATE
There is provided a piezoelectric stack, including: a substrate; an oxide film on the substrate, containing zinc and oxygen as main elements; an electrode film on the oxide film; and a piezoelectric film on the electrode film, being an alkali niobium oxide film containing potassium, sodium, niobium, and oxygen and having a perovskite structure.
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING PIEZOELECTRIC LAMINATE
PIEZOELEKTRISCHES LAMINAT, PIEZOELEKTRISCHES ELEMENT UND VERFAHREN ZUR HERSTELLUNG EINES PIEZOELEKTRISCHEN LAMINATS
STRATIFIÉ PIÉZOÉLECTRIQUE, ÉLÉMENT PIÉZOÉLECTRIQUE ET PROCÉDÉ DE FABRICATION DE STRATIFIÉ PIÉZOÉLECTRIQUE
KURODA TOSHIAKI (author) / SHIBATA KENJI (author) / WATANABE KAZUTOSHI (author) / KIMURA TAKESHI (author)
2024-10-09
Patent
Electronic Resource
English
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