A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT, AND MANUFACTURING METHOD OF PIEZOELECTRIC LAMINATE
To improve the insulating property of a piezoelectric laminate having a piezoelectric film made of alkaline niobium oxide.SOLUTION: A piezoelectric laminate includes a board, an electrode film formed on the board, a layer made of lanthanum nickelate and provided on the electrode film, and a piezoelectric film that is formed on the layer made of lanthanum nickelate and composed of an alkaline niobium oxide having a perovskite structure represented by a composition formula (K1-xNax)NbO3 (0
【課題】アルカリニオブ酸化物からなる圧電膜を有する圧電積層体の絶縁性をさらに向上させる。【解決手段】基板と、基板上に製膜された電極膜と、電極膜上に設けられたニッケル酸ランタンからなる層と、ニッケル酸ランタンからなる層上に製膜され、組成式（Ｋ１−ｘＮａｘ）ＮｂＯ３（０＜ｘ＜１）で表されるペロブスカイト構造のアルカリニオブ酸化物からなり、ＣｕおよびＭｎからなる群より選択される金属元素を０．２ａｔ％以上２．０ａｔ％以下の濃度で含む圧電膜と、を備え、圧電膜の絶縁耐圧が３５０ｋＶ／ｃｍ以上である。【選択図】図１
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT, AND MANUFACTURING METHOD OF PIEZOELECTRIC LAMINATE
To improve the insulating property of a piezoelectric laminate having a piezoelectric film made of alkaline niobium oxide.SOLUTION: A piezoelectric laminate includes a board, an electrode film formed on the board, a layer made of lanthanum nickelate and provided on the electrode film, and a piezoelectric film that is formed on the layer made of lanthanum nickelate and composed of an alkaline niobium oxide having a perovskite structure represented by a composition formula (K1-xNax)NbO3 (0
【課題】アルカリニオブ酸化物からなる圧電膜を有する圧電積層体の絶縁性をさらに向上させる。【解決手段】基板と、基板上に製膜された電極膜と、電極膜上に設けられたニッケル酸ランタンからなる層と、ニッケル酸ランタンからなる層上に製膜され、組成式（Ｋ１−ｘＮａｘ）ＮｂＯ３（０＜ｘ＜１）で表されるペロブスカイト構造のアルカリニオブ酸化物からなり、ＣｕおよびＭｎからなる群より選択される金属元素を０．２ａｔ％以上２．０ａｔ％以下の濃度で含む圧電膜と、を備え、圧電膜の絶縁耐圧が３５０ｋＶ／ｃｍ以上である。【選択図】図１
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT, AND MANUFACTURING METHOD OF PIEZOELECTRIC LAMINATE
圧電積層体、圧電素子、および圧電積層体の製造方法
SHIBATA KENJI (author) / WATANABE KAZUTOSHI (author) / KURODA TOSHIAKI (author)
2021-02-22
Patent
Electronic Resource
Japanese
Piezoelectric laminate, method of manufacturing piezoelectric laminate and piezoelectric element
| European Patent Office | 2023
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING PIEZOELECTRIC LAMINATE
| European Patent Office | 2024
PIEZOELECTRIC LAMINATE, METHOD OF MANUFACTURING PIEZOELECTRIC LAMINATE AND PIEZOELECTRIC ELEMENT
| European Patent Office | 2019
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT AND METHOD OF MANUFACTURING THE PIEZOELECTRIC LAMINATE
| European Patent Office | 2021