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Piezoelectric laminate, method of manufacturing piezoelectric laminate and piezoelectric element
There is provided a piezoelectric laminate, including: a substrate; and a piezoelectric film formed on the substrate, wherein the piezoelectric film contains an alkali niobium oxide represented by a composition formula of (K1−xNax)NbO3 (0
Piezoelectric laminate, method of manufacturing piezoelectric laminate and piezoelectric element
There is provided a piezoelectric laminate, including: a substrate; and a piezoelectric film formed on the substrate, wherein the piezoelectric film contains an alkali niobium oxide represented by a composition formula of (K1−xNax)NbO3 (0
Piezoelectric laminate, method of manufacturing piezoelectric laminate and piezoelectric element
SHIBATA KENJI (author) / WATANABE KAZUTOSHI (author) / HORIKIRI FUMIMASA (author)
2023-08-29
Patent
Electronic Resource
English
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