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METHOD FOR CONTINUOUSLY PRODUCING SILICON NITRIDE SINTERED COMPACT
Provided is a method for continuously producing a silicon nitride sintered compact for enabling a continuous production of silicon nitride sintered compacts by sintering using a silicon nitride powder having a high β-phase rate. A fired compact 1 housed in a firing jig 2 contains a silicon nitride powder having at least 80% of β-transition rate and 7 to 20 m2/g of specific surface area together with a sintering additive, where the total content of aluminum element is adjusted not to exceed 800 ppm. The firing jig 2 is supplied into a continuous firing furnace equipped with a closed-type firing container 5 having at its end portions a supplying openable door 3 and a discharging openable door 4 for supplying and discharging the firing jig, a heating mechanism 6 provided on the body periphery of the firing container 5, a conveyance mechanism for supplying/discharging the firing jig into/from the firing container, and a gas-supplying mechanism for supplying an inert gas into the firing container, so that the silicon nitride is heated to a temperature in the range of 1200 to 1800°C in an inert gas atmosphere and at a pressure of not less than 0 MPa·G and less than 0.1 MPa·G so as to be sintered.
METHOD FOR CONTINUOUSLY PRODUCING SILICON NITRIDE SINTERED COMPACT
Provided is a method for continuously producing a silicon nitride sintered compact for enabling a continuous production of silicon nitride sintered compacts by sintering using a silicon nitride powder having a high β-phase rate. A fired compact 1 housed in a firing jig 2 contains a silicon nitride powder having at least 80% of β-transition rate and 7 to 20 m2/g of specific surface area together with a sintering additive, where the total content of aluminum element is adjusted not to exceed 800 ppm. The firing jig 2 is supplied into a continuous firing furnace equipped with a closed-type firing container 5 having at its end portions a supplying openable door 3 and a discharging openable door 4 for supplying and discharging the firing jig, a heating mechanism 6 provided on the body periphery of the firing container 5, a conveyance mechanism for supplying/discharging the firing jig into/from the firing container, and a gas-supplying mechanism for supplying an inert gas into the firing container, so that the silicon nitride is heated to a temperature in the range of 1200 to 1800°C in an inert gas atmosphere and at a pressure of not less than 0 MPa·G and less than 0.1 MPa·G so as to be sintered.
METHOD FOR CONTINUOUSLY PRODUCING SILICON NITRIDE SINTERED COMPACT
VERFAHREN ZUR KONTINUIERLICHEN HERSTELLUNG EINES GESINTERTEN SILIZIUMNITRIDFORMKÖRPERS
PROCÉDÉ DE PRODUCTION EN CONTINU D'UN COMPRIMÉ FRITTÉ DE NITRURE DE SILICIUM
KUSANO DAI (author)
2023-05-03
Patent
Electronic Resource
English
METHOD FOR CONTINUOUSLY PRODUCING SILICON NITRIDE SINTERED COMPACT
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