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Method for continuously producing silicon nitride sintered body
Provided is a method for continuously producing a silicon nitride sintered body, which is capable of continuously producing a silicon nitride sintered body by sintering using a silicon nitride powder having a high beta rate. A firing jig (2) containing a fired body (1) containing a sintering aid and a silicon nitride powder having a beta ratio of 80% or more and a specific surface area of 7 m2/g to 20 m2/g, and having a total aluminum element content adjusted to 800 ppm or less, is supplied to a continuous firing furnace, and is heated to a temperature of 1200 DEG C to 1800 DEG C in an inert gas atmosphere and at a pressure of 0 MPa * G or more and less than 0.1 MPa * G to sinter the silicon nitride, thereby producing a sintered body (1), the sintered body (1) containing the sintered body (1), the sintered body (1) containing the sintered body (1), and the sintered body (1) containing the sintered body (1) containing the sintered body (1) having a beta ratio of 80% or more and a specific surface area of 7 m2/g to 20 m2/g. The continuous firing furnace is provided with: a closed firing container (5) having an opening/closing door (3) for supplying the firing jig and an opening/closing door (4) for discharging the firing jig at the end part; a heating means (6) provided on the outer periphery of the main body part of the firing container (5); and a conveying means for supplying and discharging the firing jig into and out of the firing container. And a gas supply mechanism for supplying an inert gas into the firing container.
提供一种氮化硅烧结体的连续制造方法，其能够通过使用了β化率高的氮化硅粉末的烧结连续地进行氮化硅烧结体的制造。将收纳有含有烧结助剂和β化率为80％以上、比表面积为7m2/g～20m2/g的氮化硅粉末、且铝元素的总含量调整为800ppm以下的被烧成体(1)的烧成用治具(2)供给至连续烧成炉，在非活性气体气氛下和0MPa·G以上且小于0.1MPa·G的压力下，加热至1200℃～1800℃的温度，对氮化硅进行烧结，该连续烧成炉具备：在端部具有上述烧成用治具的供给用开闭门(3)和排出用开闭门(4)的密闭式的烧成容器(5)、设置于上述烧成容器(5)的主体部外周的加热机构(6)、用于将前述烧成用治具向烧成容器内供给排出的输送机构、以及用于向烧成容器内供给非活性气体的气体供给机构。
Method for continuously producing silicon nitride sintered body
Provided is a method for continuously producing a silicon nitride sintered body, which is capable of continuously producing a silicon nitride sintered body by sintering using a silicon nitride powder having a high beta rate. A firing jig (2) containing a fired body (1) containing a sintering aid and a silicon nitride powder having a beta ratio of 80% or more and a specific surface area of 7 m2/g to 20 m2/g, and having a total aluminum element content adjusted to 800 ppm or less, is supplied to a continuous firing furnace, and is heated to a temperature of 1200 DEG C to 1800 DEG C in an inert gas atmosphere and at a pressure of 0 MPa * G or more and less than 0.1 MPa * G to sinter the silicon nitride, thereby producing a sintered body (1), the sintered body (1) containing the sintered body (1), the sintered body (1) containing the sintered body (1), and the sintered body (1) containing the sintered body (1) containing the sintered body (1) having a beta ratio of 80% or more and a specific surface area of 7 m2/g to 20 m2/g. The continuous firing furnace is provided with: a closed firing container (5) having an opening/closing door (3) for supplying the firing jig and an opening/closing door (4) for discharging the firing jig at the end part; a heating means (6) provided on the outer periphery of the main body part of the firing container (5); and a conveying means for supplying and discharging the firing jig into and out of the firing container. And a gas supply mechanism for supplying an inert gas into the firing container.
提供一种氮化硅烧结体的连续制造方法，其能够通过使用了β化率高的氮化硅粉末的烧结连续地进行氮化硅烧结体的制造。将收纳有含有烧结助剂和β化率为80％以上、比表面积为7m2/g～20m2/g的氮化硅粉末、且铝元素的总含量调整为800ppm以下的被烧成体(1)的烧成用治具(2)供给至连续烧成炉，在非活性气体气氛下和0MPa·G以上且小于0.1MPa·G的压力下，加热至1200℃～1800℃的温度，对氮化硅进行烧结，该连续烧成炉具备：在端部具有上述烧成用治具的供给用开闭门(3)和排出用开闭门(4)的密闭式的烧成容器(5)、设置于上述烧成容器(5)的主体部外周的加热机构(6)、用于将前述烧成用治具向烧成容器内供给排出的输送机构、以及用于向烧成容器内供给非活性气体的气体供给机构。
Method for continuously producing silicon nitride sintered body
氮化硅烧结体的连续制造方法
KUSANO DAI (author)
2023-02-24
Patent
Electronic Resource
Chinese
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