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BATCH SINTERING METHOD FOR HIGH-PERFORMANCE SILICON NITRIDE CERAMIC SUBSTRATE
The present disclosure relates to a batch sintering method for a high-property silicon nitride ceramic substrate. The batch sintering method includes: (1) silicon nitride ceramic substrate green bodies are stacked and put into a boron nitride crucible, and a layer of boron nitride powder is applied between adjacent silicon nitride ceramic substrate green bodies; (2) after step-by-step vacuumization, debinding is performed in a nitrogen atmosphere or a reducing atmosphere at 500 °C to 900 °C; (3) gas pressure sintering is then performed in a nitrogen atmosphere at 1800 °C to 2000 °C, completing the batch preparation of the high-property silicon nitride ceramic substrate.
BATCH SINTERING METHOD FOR HIGH-PERFORMANCE SILICON NITRIDE CERAMIC SUBSTRATE
The present disclosure relates to a batch sintering method for a high-property silicon nitride ceramic substrate. The batch sintering method includes: (1) silicon nitride ceramic substrate green bodies are stacked and put into a boron nitride crucible, and a layer of boron nitride powder is applied between adjacent silicon nitride ceramic substrate green bodies; (2) after step-by-step vacuumization, debinding is performed in a nitrogen atmosphere or a reducing atmosphere at 500 °C to 900 °C; (3) gas pressure sintering is then performed in a nitrogen atmosphere at 1800 °C to 2000 °C, completing the batch preparation of the high-property silicon nitride ceramic substrate.
BATCH SINTERING METHOD FOR HIGH-PERFORMANCE SILICON NITRIDE CERAMIC SUBSTRATE
CHARGENSINTERVERFAHREN FÜR HOCHLEISTUNGSFÄHIGES SILICIUMNITRIDKERAMIKSUBSTRAT
PROCÉDÉ DE FRITTAGE PAR LOTS POUR SUBSTRAT CÉRAMIQUE EN NITRURE DE SILICIUM À HAUTE PERFORMANCE
ZHANG HUI (author) / LIU XUEJIAN (author) / JIANG JINDI (author) / YAO XIUMIN (author) / HUANG ZHENGREN (author) / CHEN ZHONGMING (author) / HUANG JIAN (author)
2025-02-05
Patent
Electronic Resource
English
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