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METHOD FOR PREPARING SILICON NITRIDE POWDER FOR MANUFACTURING SUBSTRATE AND SILICON NITRIDE POWDER PREPARED THEREBY
Provided is a method for preparing silicon nitride powder for manufacturing a substrate. The method for preparing silicon nitride powder for manufacturing a substrate, according to an embodiment of the present invention, comprises the steps of: preparing mixed raw material powder comprising metallic silicon powder and crystalline phase control powder; preparing the mixed raw material powder into granules having a predetermined particle size; nitrifying the granules at a predetermined temperature ranging from 1,200-1,500°C while nitrogen gas is applied to the granules at a predetermined pressure; and pulverizing the nitrified granules. According to the method, it is easy to realize powder having an α crystal phase at a desired level, and when this is realized as a substrate, a substrate having compact density can be manufactured.
METHOD FOR PREPARING SILICON NITRIDE POWDER FOR MANUFACTURING SUBSTRATE AND SILICON NITRIDE POWDER PREPARED THEREBY
Provided is a method for preparing silicon nitride powder for manufacturing a substrate. The method for preparing silicon nitride powder for manufacturing a substrate, according to an embodiment of the present invention, comprises the steps of: preparing mixed raw material powder comprising metallic silicon powder and crystalline phase control powder; preparing the mixed raw material powder into granules having a predetermined particle size; nitrifying the granules at a predetermined temperature ranging from 1,200-1,500°C while nitrogen gas is applied to the granules at a predetermined pressure; and pulverizing the nitrified granules. According to the method, it is easy to realize powder having an α crystal phase at a desired level, and when this is realized as a substrate, a substrate having compact density can be manufactured.
METHOD FOR PREPARING SILICON NITRIDE POWDER FOR MANUFACTURING SUBSTRATE AND SILICON NITRIDE POWDER PREPARED THEREBY
VERFAHREN ZUR HERSTELLUNG VON SILICIUMNITRIDPULVER ZUR HERSTELLUNG EINES SUBSTRATS UND DADURCH HERGESTELLTES SILICIUMNITRIDPULVER
PROCÉDÉ DE PRÉPARATION DE POUDRE DE NITRURE DE SILICIUM POUR LA FABRICATION D'UN SUBSTRAT ET POUDRE DE NITRURE DE SILICIUM AINSI PRÉPARÉE
PARK KYU HWAN (author) / CHEONG HUN (author)
2024-01-24
Patent
Electronic Resource
English
| European Patent Office | 2022
European Patent Office | 2024
| European Patent Office | 2022
| European Patent Office | 2024
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