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    TUNGSTEN SILICIDE TARGET AND METHOD OF MANUFACTURING SAME

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    New search for: ASANO TAKAYUKI

    A tungsten silicide target capable of suppressing the occurrence of particles during sputtering is provided by a method different from conventional methods. The tungsten silicide target includes not more than 5 low-density semi-sintered portions having a size of 50 µm or more per 80000 mm2 on the sputtering surface.

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    TUNGSTEN SILICIDE TARGET AND METHOD OF MANUFACTURING SAME

    New search for: ODA KUNIHIRO
    New search for: ASANO TAKAYUKI

    A tungsten silicide target capable of suppressing the occurrence of particles during sputtering is provided by a method different from conventional methods. The tungsten silicide target includes not more than 5 low-density semi-sintered portions having a size of 50 µm or more per 80000 mm2 on the sputtering surface.

    Access

    Download

    TUNGSTEN SILICIDE TARGET AND METHOD OF MANUFACTURING SAME

    New search for: ODA KUNIHIRO
    New search for: ASANO TAKAYUKI

    A tungsten silicide target capable of suppressing the occurrence of particles during sputtering is provided by a method different from conventional methods. The tungsten silicide target includes not more than 5 low-density semi-sintered portions having a size of 50 µm or more per 80000 mm2 on the sputtering surface.

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    Title:

    TUNGSTEN SILICIDE TARGET AND METHOD OF MANUFACTURING SAME

    Additional title:

    WOLFRAMSILIZID-TARGET UND VERFAHREN ZU DESSEN HERSTELLUNG
    CIBLE EN SILICIURE DE TUNGSTÈNE ET SON PROCÉDÉ DE FABRICATION

    Contributors:

    ODA KUNIHIRO (author) / ASANO TAKAYUKI (author)

    Publication date:

    2024-06-12

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / C01B NON-METALLIC ELEMENTS , Nichtmetallische Elemente / C04B Kalk , LIME / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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