A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG EINES SILIZIUMKARBIDHALTIGEN WERKSTÜCKS
Provided are a method and a device for producing a silicon carbide-containing workpiece in which: a blank (2) is held in a heated reactor (1), a gas composition is conducted into the reactor (1) as a precursor for the silicon carbide production, wherein the gas composition contains gaseous tetrachlorosilane as the silicon source and a hydrocarbon gas as the carbon source, and the silicon carbide-containing workpiece is produced from the blank (2) under the action of the gas composition.
VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG EINES SILIZIUMKARBIDHALTIGEN WERKSTÜCKS
Provided are a method and a device for producing a silicon carbide-containing workpiece in which: a blank (2) is held in a heated reactor (1), a gas composition is conducted into the reactor (1) as a precursor for the silicon carbide production, wherein the gas composition contains gaseous tetrachlorosilane as the silicon source and a hydrocarbon gas as the carbon source, and the silicon carbide-containing workpiece is produced from the blank (2) under the action of the gas composition.
VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG EINES SILIZIUMKARBIDHALTIGEN WERKSTÜCKS
METHOD AND DEVICE FOR PRODUCING A SILICON CARBIDE-CONTAINING WORKPIECE
PROCÉDÉ ET DISPOSITIF POUR FABRIQUER UNE PIÈCE CONTENANT DU CARBURE DE SILICIUM
GREULICH-WEBER SIEGMUND (author)
2024-12-11
Patent
Electronic Resource
German
IPC:
C04B
Kalk
,
LIME
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