A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
MANUFACTURING METHOD OF SILICON CARBIDE-COATED GRAPHITE MEMBER, SILICON CARBIDE COATED GRAPHITE MEMBER, AND MANUFACTURING METHOD OF SILICON CRYSTAL
PROBLEM TO BE SOLVED: To provide a manufacturing method of a silicon carbide-coated graphite member in which life of a graphite component is significantly increased by effectively suppressing conversion of the graphite component used in a silicon crystal manufacturing apparatus and the like into an SiC layer.SOLUTION: There is provided a manufacturing method of a silicon carbide-coated graphite member 5 in which by coating and impregnating 3 silicone oil into a graphite component 2 on a surface of which an SiC layer 1 is formed and firing the component, the SiC layer is densified 4. After the component is air-dried or heated and dried at temperature of 100°C or lower after coating and impregnating 3 the silicone oil, the firing is performed at the highest firing temperature of 1,500°C or higher through one stage or more of heating steps in an inert gas atmosphere.
【課題】シリコン結晶製造装置等に使用されている黒鉛部品に対して、黒鉛部品のＳｉＣ層への転化を効果的に抑制することで、黒鉛部品の寿命を飛躍的に向上させた炭化珪素被覆黒鉛部材の製造方法を提供する。【解決手段】表面にＳｉＣ層１が形成された黒鉛部品２に、シリコーンオイルを塗布含浸３し、焼成することにより、前記ＳｉＣ層を緻密化４することを特徴とする炭化珪素被覆黒鉛部材５の製造方法。前記シリコーンオイルを塗布含浸３後に風乾もしくは１００℃以下の温度で加熱乾燥させた後、前記焼成を、不活性ガス雰囲気中で、１段以上の加熱ステップを経由し、最高焼成温度１，５００℃以上にて行う炭化珪素被覆黒鉛部材５の製造方法。【選択図】図１
MANUFACTURING METHOD OF SILICON CARBIDE-COATED GRAPHITE MEMBER, SILICON CARBIDE COATED GRAPHITE MEMBER, AND MANUFACTURING METHOD OF SILICON CRYSTAL
PROBLEM TO BE SOLVED: To provide a manufacturing method of a silicon carbide-coated graphite member in which life of a graphite component is significantly increased by effectively suppressing conversion of the graphite component used in a silicon crystal manufacturing apparatus and the like into an SiC layer.SOLUTION: There is provided a manufacturing method of a silicon carbide-coated graphite member 5 in which by coating and impregnating 3 silicone oil into a graphite component 2 on a surface of which an SiC layer 1 is formed and firing the component, the SiC layer is densified 4. After the component is air-dried or heated and dried at temperature of 100°C or lower after coating and impregnating 3 the silicone oil, the firing is performed at the highest firing temperature of 1,500°C or higher through one stage or more of heating steps in an inert gas atmosphere.
【課題】シリコン結晶製造装置等に使用されている黒鉛部品に対して、黒鉛部品のＳｉＣ層への転化を効果的に抑制することで、黒鉛部品の寿命を飛躍的に向上させた炭化珪素被覆黒鉛部材の製造方法を提供する。【解決手段】表面にＳｉＣ層１が形成された黒鉛部品２に、シリコーンオイルを塗布含浸３し、焼成することにより、前記ＳｉＣ層を緻密化４することを特徴とする炭化珪素被覆黒鉛部材５の製造方法。前記シリコーンオイルを塗布含浸３後に風乾もしくは１００℃以下の温度で加熱乾燥させた後、前記焼成を、不活性ガス雰囲気中で、１段以上の加熱ステップを経由し、最高焼成温度１，５００℃以上にて行う炭化珪素被覆黒鉛部材５の製造方法。【選択図】図１
MANUFACTURING METHOD OF SILICON CARBIDE-COATED GRAPHITE MEMBER, SILICON CARBIDE COATED GRAPHITE MEMBER, AND MANUFACTURING METHOD OF SILICON CRYSTAL
炭化珪素被覆黒鉛部材の製造方法、炭化珪素被覆黒鉛部材、及びシリコン結晶の製造方法。
SUGAWARA TAKAYO (author) / ONAI TAKAHIDE (author) / HOSHI RYOJI (author)
2015-06-11
Patent
Electronic Resource
Japanese
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