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MANUFACTURING METHOD OF JOINED BODY OF SILICON CARBIDE CLAD GRAPHITE MEMBER
To provide a manufacturing method of a joined body of a SiC clad graphite material high in bond strength, excellent in dimensional accuracy, and high in air-tightness.SOLUTION: A manufacturing method of a joint body of SiC clad graphite members in which a CVD-SiC layer is composed of a first CVD-SiC layer that covers a surface of a substrate made of graphite, and a second CVD-SiC layer that joints a plurality of the substrates. The method comprises: a step of combining a plurality of the SiC clad graphite members each having the first CVD-SiC layer on a combination surface; and a joining step of covering the combined plurality of the SiC clad graphite members from further outside by the second CVD-SiC layer. At least one of the SiC clad graphite members has a convex part higher than the surrounding on one side of the combination plane, and a concave part opening to the outside. The second CVD-SiC layer has a first joint part joining a plurality of the SiC clad graphite members on the outside of the convex part of the combination plane along an outer surface of the joint body.SELECTED DRAWING: Figure 1
【課題】接合強度が高く、寸法精度に優れ、気密性の高いSiC被覆黒鉛材料の接合体の製造方法を提供する。【解決手段】CVD−SiC層が、黒鉛からなる基材の表面を覆う第1のCVD−SiC層と、前記基材を複数個接合する第2のCVD−SiC層とからなるSiC被覆黒鉛部材の接合体の製造方法であって、組み合わせ面で第1のCVD−SiC層を有するSiC被覆黒鉛部材を複数組み合わせる組み合わせ工程と、組み合わされた複数のSiC被覆黒鉛部材をさらに外側から第2のCVD−SiC層で覆う接合工程とを含み、少なくとも一方のSiC被覆黒鉛部材は、前記組み合わせ面の一端側に周囲よりも高い凸部と、外部に開口する凹部を有し、前記第2のCVD—SiC層は、前記組み合わせ面の凸部の外側で複数の前記SiC被覆黒鉛部材を接合体の外表面に沿って接合する第一の接合部を有することを特徴とするSiC被覆黒鉛部材の接合体の製造方法。【選択図】図1
MANUFACTURING METHOD OF JOINED BODY OF SILICON CARBIDE CLAD GRAPHITE MEMBER
To provide a manufacturing method of a joined body of a SiC clad graphite material high in bond strength, excellent in dimensional accuracy, and high in air-tightness.SOLUTION: A manufacturing method of a joint body of SiC clad graphite members in which a CVD-SiC layer is composed of a first CVD-SiC layer that covers a surface of a substrate made of graphite, and a second CVD-SiC layer that joints a plurality of the substrates. The method comprises: a step of combining a plurality of the SiC clad graphite members each having the first CVD-SiC layer on a combination surface; and a joining step of covering the combined plurality of the SiC clad graphite members from further outside by the second CVD-SiC layer. At least one of the SiC clad graphite members has a convex part higher than the surrounding on one side of the combination plane, and a concave part opening to the outside. The second CVD-SiC layer has a first joint part joining a plurality of the SiC clad graphite members on the outside of the convex part of the combination plane along an outer surface of the joint body.SELECTED DRAWING: Figure 1
【課題】接合強度が高く、寸法精度に優れ、気密性の高いSiC被覆黒鉛材料の接合体の製造方法を提供する。【解決手段】CVD−SiC層が、黒鉛からなる基材の表面を覆う第1のCVD−SiC層と、前記基材を複数個接合する第2のCVD−SiC層とからなるSiC被覆黒鉛部材の接合体の製造方法であって、組み合わせ面で第1のCVD−SiC層を有するSiC被覆黒鉛部材を複数組み合わせる組み合わせ工程と、組み合わされた複数のSiC被覆黒鉛部材をさらに外側から第2のCVD−SiC層で覆う接合工程とを含み、少なくとも一方のSiC被覆黒鉛部材は、前記組み合わせ面の一端側に周囲よりも高い凸部と、外部に開口する凹部を有し、前記第2のCVD—SiC層は、前記組み合わせ面の凸部の外側で複数の前記SiC被覆黒鉛部材を接合体の外表面に沿って接合する第一の接合部を有することを特徴とするSiC被覆黒鉛部材の接合体の製造方法。【選択図】図1
MANUFACTURING METHOD OF JOINED BODY OF SILICON CARBIDE CLAD GRAPHITE MEMBER
SiC被覆黒鉛部材の接合体の製造方法
HORIO SACHIKA (author) / NOMURA MADOKA (author) / HIGUCHI NAOKI (author)
2021-09-27
Patent
Electronic Resource
Japanese
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