A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
FERROELECTRIC CERAMIC
PROBLEM TO BE SOLVED: To obtain a piezoelectric film having good piezoelectric characteristics.SOLUTION: An embodiment of the present invention relates to a ferroelectric ceramic which includes a first laminated film 12 and a piezoelectric film 15 formed on the first laminated film 12. In the first laminated film, a first ZrOfilm 122 and an XOfilm 123 are formed, in order, by a repetition of N times, and a second ZrOfilm 124 is formed on the film formed by the repetition of N times, where the X represents Ca, mg or Hf, the Y represents 1 or 2, and the N represents an integer of 1 or more. The ratio of X/(Zr+X) of the first laminated film is preferably less than 33%.
【課題】良好な圧電特性を有する圧電体膜を得ることを課題とする。【解決手段】本発明の一態様は、第１積層膜１２上に形成された圧電体膜１５と、を具備し、前記第１積層膜は、第１のＺｒＯ２膜１２２とＸＯＹ膜１２３が順次Ｎ回繰り返して形成され、前記Ｎ回繰り返して形成された膜上に第２のＺｒＯ２膜１２４が形成されたものであり、前記Ｘは、Ｃａ、ＭｇまたはＨｆであり、前記Ｙは１または２であり、前記Ｎは１以上の整数である強誘電体セラミックスである。前記第１積層膜のＸ／（Ｚｒ＋Ｘ）の比率は３３％未満であるとよい。【選択図】図１
FERROELECTRIC CERAMIC
PROBLEM TO BE SOLVED: To obtain a piezoelectric film having good piezoelectric characteristics.SOLUTION: An embodiment of the present invention relates to a ferroelectric ceramic which includes a first laminated film 12 and a piezoelectric film 15 formed on the first laminated film 12. In the first laminated film, a first ZrOfilm 122 and an XOfilm 123 are formed, in order, by a repetition of N times, and a second ZrOfilm 124 is formed on the film formed by the repetition of N times, where the X represents Ca, mg or Hf, the Y represents 1 or 2, and the N represents an integer of 1 or more. The ratio of X/(Zr+X) of the first laminated film is preferably less than 33%.
【課題】良好な圧電特性を有する圧電体膜を得ることを課題とする。【解決手段】本発明の一態様は、第１積層膜１２上に形成された圧電体膜１５と、を具備し、前記第１積層膜は、第１のＺｒＯ２膜１２２とＸＯＹ膜１２３が順次Ｎ回繰り返して形成され、前記Ｎ回繰り返して形成された膜上に第２のＺｒＯ２膜１２４が形成されたものであり、前記Ｘは、Ｃａ、ＭｇまたはＨｆであり、前記Ｙは１または２であり、前記Ｎは１以上の整数である強誘電体セラミックスである。前記第１積層膜のＸ／（Ｚｒ＋Ｘ）の比率は３３％未満であるとよい。【選択図】図１
FERROELECTRIC CERAMIC
強誘電体セラミックス
KIJIMA TAKESHI (author) / HONDA YUJI (author) / FURUYAMA KOICHI (author)
2016-01-18
Patent
Electronic Resource
Japanese
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