A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
MANUFACTURING METHOD OF LITHIUM NICKEL OXIDE SPUTTERING TARGET
PROBLEM TO BE SOLVED: To provide a lithium nickel oxide sputtering target by using target materials of lithium carbonate (LiCO) and nickel oxide (NiO), which has a stoichiometric composition and no composition deviation.SOLUTION: A manufacturing method of a sputtering target includes steps of: firing to obtain a LiNiOfired body by firing mixed powders of a LiCOpowder and a NiO powder and firing them at 700-900°C in air; crushing the LiNiOsintered body to obtain a LiNiOpowder; pressure sintering to obtain an intermediate sintered body by pressure-sintering the LiNiOpowder at 400-600°C in a reducing atmosphere; and sintering to obtain a LiNiOsintered body by heating and holding the intermediate sintered body at 700-850°C in air to sinter the intermediate sintered body.SELECTED DRAWING: None
【課題】炭酸リチウム（Ｌｉ２ＣＯ３）と酸化ニッケル（ＮｉＯ）とをターゲット原料として、化学量論組成を有し、組成ずれのないニッケル酸リチウムスパッタリングターゲットの製造方法を提供する。【解決手段】Ｌｉ２ＣＯ３粉末とＮｉＯ粉末との混合粉末を、大気中、７００〜９００℃で焼成し、ＬｉＮｉＯ２焼成体を得る焼成工程と、前記ＬｉＮｉＯ２焼成体を粉砕してＬｉＮｉＯ２粉末を得る粉砕工程と、前記ＬｉＮｉＯ２粉末を還元雰囲気で、４００〜６００℃で加圧焼結して、中間焼結体を得る加圧焼結工程と、前記中間焼結体を、大気中で、７００〜８５０℃で加熱保持して、焼結してＬｉＮｉＯ２焼結体を得る焼結工程とを備えたスパッタリングターゲット製造方法。【選択図】なし
MANUFACTURING METHOD OF LITHIUM NICKEL OXIDE SPUTTERING TARGET
PROBLEM TO BE SOLVED: To provide a lithium nickel oxide sputtering target by using target materials of lithium carbonate (LiCO) and nickel oxide (NiO), which has a stoichiometric composition and no composition deviation.SOLUTION: A manufacturing method of a sputtering target includes steps of: firing to obtain a LiNiOfired body by firing mixed powders of a LiCOpowder and a NiO powder and firing them at 700-900°C in air; crushing the LiNiOsintered body to obtain a LiNiOpowder; pressure sintering to obtain an intermediate sintered body by pressure-sintering the LiNiOpowder at 400-600°C in a reducing atmosphere; and sintering to obtain a LiNiOsintered body by heating and holding the intermediate sintered body at 700-850°C in air to sinter the intermediate sintered body.SELECTED DRAWING: None
【課題】炭酸リチウム（Ｌｉ２ＣＯ３）と酸化ニッケル（ＮｉＯ）とをターゲット原料として、化学量論組成を有し、組成ずれのないニッケル酸リチウムスパッタリングターゲットの製造方法を提供する。【解決手段】Ｌｉ２ＣＯ３粉末とＮｉＯ粉末との混合粉末を、大気中、７００〜９００℃で焼成し、ＬｉＮｉＯ２焼成体を得る焼成工程と、前記ＬｉＮｉＯ２焼成体を粉砕してＬｉＮｉＯ２粉末を得る粉砕工程と、前記ＬｉＮｉＯ２粉末を還元雰囲気で、４００〜６００℃で加圧焼結して、中間焼結体を得る加圧焼結工程と、前記中間焼結体を、大気中で、７００〜８５０℃で加熱保持して、焼結してＬｉＮｉＯ２焼結体を得る焼結工程とを備えたスパッタリングターゲット製造方法。【選択図】なし
MANUFACTURING METHOD OF LITHIUM NICKEL OXIDE SPUTTERING TARGET
ニッケル酸リチウムスパッタリングターゲットの製造方法
NAGAO MASAYOSHI (author)
2016-02-08
Patent
Electronic Resource
Japanese
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