A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
TIN OXIDE-BASED SINTERED BODY TABLET AND OXIDE TRANSPARENT CONDUCTIVE FILM
PROBLEM TO BE SOLVED: To provide an oxide transparent conductive film having high transparency and specific resistance and a tin oxide-based sintered body tablet for manufacturing the oxide transparent conductive film.SOLUTION: The tin oxide-based sintered body tablet mainly contains tin oxide, contains 1.0 mass% to 10.0 mass% inclusive of tungsten oxide as a dopant and has density of 4.0 g/cmto 5.0 g/cminclusive. The tablet has the effect of stably manufacturing an oxide transparent conductive film having high transparency (95% or more in a wave length range of 500 nm to 600 nm) and high specific resistance (3×10Ω cm to 5×10Ω cm) in a visible light region because breakage and a splash phenomenon of the tablet are prevented even when the tablet is applied to a vacuum deposition method capable of industrial mass production.SELECTED DRAWING: None
【課題】高い透過率と比抵抗を有する酸化物透明導電膜と該酸化物透明導電膜を製造するための酸化錫系焼結体タブレットを提供すること。【解決手段】この酸化錫系焼結体タブレットは、酸化錫を主成分とし、ドーパントとして酸化タングステンを１．０質量％以上１０．０質量％以下含有し、かつ、密度が４．０ｇ／ｃｍ3以上５．０ｇ／ｃｍ3以下であることを特徴する。このタブレットによれば、該タブレットを工業的に量産可能な真空蒸着法に適用してもタブレットが破損しあるいはスプラッシュ現象を発生させることがないため、可視光領域における高い透過率（波長５００ｎｍ〜６００ｎｍ領域において９５％以上）と高い比抵抗（３×１０3Ω・ｃｍ〜５×１０6Ω・ｃｍ）を有する酸化物透明導電膜を安定して製造できる効果を有する。【選択図】なし
TIN OXIDE-BASED SINTERED BODY TABLET AND OXIDE TRANSPARENT CONDUCTIVE FILM
PROBLEM TO BE SOLVED: To provide an oxide transparent conductive film having high transparency and specific resistance and a tin oxide-based sintered body tablet for manufacturing the oxide transparent conductive film.SOLUTION: The tin oxide-based sintered body tablet mainly contains tin oxide, contains 1.0 mass% to 10.0 mass% inclusive of tungsten oxide as a dopant and has density of 4.0 g/cmto 5.0 g/cminclusive. The tablet has the effect of stably manufacturing an oxide transparent conductive film having high transparency (95% or more in a wave length range of 500 nm to 600 nm) and high specific resistance (3×10Ω cm to 5×10Ω cm) in a visible light region because breakage and a splash phenomenon of the tablet are prevented even when the tablet is applied to a vacuum deposition method capable of industrial mass production.SELECTED DRAWING: None
【課題】高い透過率と比抵抗を有する酸化物透明導電膜と該酸化物透明導電膜を製造するための酸化錫系焼結体タブレットを提供すること。【解決手段】この酸化錫系焼結体タブレットは、酸化錫を主成分とし、ドーパントとして酸化タングステンを１．０質量％以上１０．０質量％以下含有し、かつ、密度が４．０ｇ／ｃｍ3以上５．０ｇ／ｃｍ3以下であることを特徴する。このタブレットによれば、該タブレットを工業的に量産可能な真空蒸着法に適用してもタブレットが破損しあるいはスプラッシュ現象を発生させることがないため、可視光領域における高い透過率（波長５００ｎｍ〜６００ｎｍ領域において９５％以上）と高い比抵抗（３×１０3Ω・ｃｍ〜５×１０6Ω・ｃｍ）を有する酸化物透明導電膜を安定して製造できる効果を有する。【選択図】なし
TIN OXIDE-BASED SINTERED BODY TABLET AND OXIDE TRANSPARENT CONDUCTIVE FILM
酸化錫系焼結体タブレットと酸化物透明導電膜
KUWAHARA MASAKAZU (author)
2016-06-30
Patent
Electronic Resource
Japanese
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