A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
OXIDE SINTERED BODY AND OXIDE TRANSPARENT CONDUCTIVE FILM
PROBLEM TO BE SOLVED: To provide an oxide sintered body which exhibits lower optical absorption properties over a wide wavelength region and enables an oxide transparent conductive film having low resistance to be obtained, and provide an oxide transparent conductive film thus obtained.SOLUTION: The oxide sintered body including indium, hafnium, tantalum, and oxygen as constituent elements is used. In the oxide sintered body, by atomic ratio, Hf/(In+Hf+Ta) is 0.2 to 3.0 at%, and Ta/(In+Hf+Ta) is 0.02 to 1.3 at% on the assumption that indium, hafnium, and tantalum are represented by In, Hf, and Ta, respectively.SELECTED DRAWING: None
【課題】 本発明は、広い波長域に渡ってより低い光吸収特性を示し、かつ低抵抗の酸化物透明導電膜を得ることができる酸化物焼結体、及び酸化物透明導電膜を提供することを目的とする。【解決手段】 構成元素としてインジウム、ハフニウム、タンタル及び酸素を有する酸化物焼結体であって、インジウム、ハフニウム及びタンタルをそれぞれＩｎ、Ｈｆ及びＴａとしたときに、原子比でＨｆ／（Ｉｎ＋Ｈｆ＋Ｔａ）が０．２〜３．０ａｔ％、Ｔａ／（Ｉｎ＋Ｈｆ＋Ｔａ）が０．０２〜１．３ａｔ％である酸化物焼結体を使用する。【選択図】 なし
OXIDE SINTERED BODY AND OXIDE TRANSPARENT CONDUCTIVE FILM
PROBLEM TO BE SOLVED: To provide an oxide sintered body which exhibits lower optical absorption properties over a wide wavelength region and enables an oxide transparent conductive film having low resistance to be obtained, and provide an oxide transparent conductive film thus obtained.SOLUTION: The oxide sintered body including indium, hafnium, tantalum, and oxygen as constituent elements is used. In the oxide sintered body, by atomic ratio, Hf/(In+Hf+Ta) is 0.2 to 3.0 at%, and Ta/(In+Hf+Ta) is 0.02 to 1.3 at% on the assumption that indium, hafnium, and tantalum are represented by In, Hf, and Ta, respectively.SELECTED DRAWING: None
【課題】 本発明は、広い波長域に渡ってより低い光吸収特性を示し、かつ低抵抗の酸化物透明導電膜を得ることができる酸化物焼結体、及び酸化物透明導電膜を提供することを目的とする。【解決手段】 構成元素としてインジウム、ハフニウム、タンタル及び酸素を有する酸化物焼結体であって、インジウム、ハフニウム及びタンタルをそれぞれＩｎ、Ｈｆ及びＴａとしたときに、原子比でＨｆ／（Ｉｎ＋Ｈｆ＋Ｔａ）が０．２〜３．０ａｔ％、Ｔａ／（Ｉｎ＋Ｈｆ＋Ｔａ）が０．０２〜１．３ａｔ％である酸化物焼結体を使用する。【選択図】 なし
OXIDE SINTERED BODY AND OXIDE TRANSPARENT CONDUCTIVE FILM
酸化物焼結体及び酸化物透明導電膜
AKIIKE RYO (author) / TSUCHIDA HIRONARI (author) / KURAMOCHI TOSHIHITO (author)
2017-08-31
Patent
Electronic Resource
Japanese
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