A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
OXIDE SINTERED BODY AND OXIDE TRANSPARENT CONDUCTIVE FILM
PROBLEM TO BE SOLVED: To provide an oxide sintered body capable of realizing a sufficiently low resistivity even in a production process in which the maximum temperature in the process for film production or element production is suppressed at a low temperature, and an oxide transparent conductive film obtained therefrom.SOLUTION: In an oxide sintered body having indium(In), zirconium(Zr), yttrium(Y), scandium(Sc) and oxygen(O) as constituent elements, the atomic ratio is Zr/(In+Zr+Y+Sc) of 0.1-3.0 at%, Y/(In+Zr+Y+Sc) of 0.005-0.3 at%, and Sc/(In+Zr+Y+Sc) of 0.001-0.45 at%.SELECTED DRAWING: None
【課題】成膜や素子製造のプロセスの最高温度を低温に抑えた製造プロセスにおいても十分に低い抵抗率を実現することのできる酸化物焼結体、及びそれにより得られる酸化物透明導電膜の提供。【解決手段】構成元素として、インジウム（Ｉｎ）、ジルコニウム（Ｚｒ）、イットリウム（Ｙ）、スカンジウム（Ｓｃ）及び酸素（Ｏ）を有する酸化物焼結体であり、原子比でＺｒ／（Ｉｎ＋Ｚｒ＋Ｙ＋Ｓｃ）が０．１〜３．０ａｔ％であり、Ｙ／（Ｉｎ＋Ｚｒ＋Ｙ＋Ｓｃ）が０．００５〜０．３ａｔ％であり、Ｓｃ／（Ｉｎ＋Ｚｒ＋Ｙ＋Ｓｃ）が０．００１〜０．４５ａｔ％である、酸化物焼結体。【選択図】なし
OXIDE SINTERED BODY AND OXIDE TRANSPARENT CONDUCTIVE FILM
PROBLEM TO BE SOLVED: To provide an oxide sintered body capable of realizing a sufficiently low resistivity even in a production process in which the maximum temperature in the process for film production or element production is suppressed at a low temperature, and an oxide transparent conductive film obtained therefrom.SOLUTION: In an oxide sintered body having indium(In), zirconium(Zr), yttrium(Y), scandium(Sc) and oxygen(O) as constituent elements, the atomic ratio is Zr/(In+Zr+Y+Sc) of 0.1-3.0 at%, Y/(In+Zr+Y+Sc) of 0.005-0.3 at%, and Sc/(In+Zr+Y+Sc) of 0.001-0.45 at%.SELECTED DRAWING: None
【課題】成膜や素子製造のプロセスの最高温度を低温に抑えた製造プロセスにおいても十分に低い抵抗率を実現することのできる酸化物焼結体、及びそれにより得られる酸化物透明導電膜の提供。【解決手段】構成元素として、インジウム（Ｉｎ）、ジルコニウム（Ｚｒ）、イットリウム（Ｙ）、スカンジウム（Ｓｃ）及び酸素（Ｏ）を有する酸化物焼結体であり、原子比でＺｒ／（Ｉｎ＋Ｚｒ＋Ｙ＋Ｓｃ）が０．１〜３．０ａｔ％であり、Ｙ／（Ｉｎ＋Ｚｒ＋Ｙ＋Ｓｃ）が０．００５〜０．３ａｔ％であり、Ｓｃ／（Ｉｎ＋Ｚｒ＋Ｙ＋Ｓｃ）が０．００１〜０．４５ａｔ％である、酸化物焼結体。【選択図】なし
OXIDE SINTERED BODY AND OXIDE TRANSPARENT CONDUCTIVE FILM
酸化物焼結体及び酸化物透明導電膜
KURAMOCHI TOSHIHITO (author) / AKIIKE RYO (author) / TSUCHIDA HIRONARI (author)
2017-09-28
Patent
Electronic Resource
Japanese
OXIDE SINTERED BODY AND OXIDE TRANSPARENT CONDUCTIVE FILM
| European Patent Office | 2017
OXIDE SINTERED BODY AND TRANSPARENT CONDUCTIVE OXIDE FILM
| European Patent Office | 2021
OXIDE SINTERED BODY AND OXIDE TRANSPARENT CONDUCTIVE FILM
| European Patent Office | 2015
Oxide sintered body and transparent conductive oxide film
| European Patent Office | 2022
Oxide sintered body and transparent conductive oxide film
| European Patent Office | 2020