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PIEZOELECTRIC FILM AND PIEZOELECTRIC CERAMICS
PROBLEM TO BE SOLVED: To make a piezoelectric film piezoelectrically actuated at a higher voltage in comparison with a conventional one.SOLUTION: A piezoelectric film is characterized in that a voltage having the minimum value in piezoelectric butterfly curve as a result obtained by measuring piezoelectric characteristics of a piezoelectric film 23 is by at least 2V larger than a coercive voltage of a hysteresis curve as the result obtained by measuring hysteresis characteristics of the piezoelectric film. The piezoelectric film 23 has an antiferroelectric film 21 and a ferroelectric film 22 formed on the antiferroelectric film 21.SELECTED DRAWING: Figure 1
【課題】従来の圧電膜に比べて高い電圧で圧電動作させることを課題とする。【解決手段】本発明の一態様は、圧電膜23の圧電特性を測定した結果である圧電バタフライ曲線が極小値を取る電圧が、前記圧電膜のヒステリシス特性を測定した結果であるヒステリシス曲線の抗電圧より2V以上大きい圧電膜である。前記圧電膜23は、反強誘電体膜21と、前記反強誘電体膜21上に形成された強誘電体膜22を有する。【選択図】図1
PIEZOELECTRIC FILM AND PIEZOELECTRIC CERAMICS
PROBLEM TO BE SOLVED: To make a piezoelectric film piezoelectrically actuated at a higher voltage in comparison with a conventional one.SOLUTION: A piezoelectric film is characterized in that a voltage having the minimum value in piezoelectric butterfly curve as a result obtained by measuring piezoelectric characteristics of a piezoelectric film 23 is by at least 2V larger than a coercive voltage of a hysteresis curve as the result obtained by measuring hysteresis characteristics of the piezoelectric film. The piezoelectric film 23 has an antiferroelectric film 21 and a ferroelectric film 22 formed on the antiferroelectric film 21.SELECTED DRAWING: Figure 1
【課題】従来の圧電膜に比べて高い電圧で圧電動作させることを課題とする。【解決手段】本発明の一態様は、圧電膜23の圧電特性を測定した結果である圧電バタフライ曲線が極小値を取る電圧が、前記圧電膜のヒステリシス特性を測定した結果であるヒステリシス曲線の抗電圧より2V以上大きい圧電膜である。前記圧電膜23は、反強誘電体膜21と、前記反強誘電体膜21上に形成された強誘電体膜22を有する。【選択図】図1
PIEZOELECTRIC FILM AND PIEZOELECTRIC CERAMICS
圧電膜及び圧電セラミックス
KIJIMA TAKESHI (author) / HAMADA YASUAKI (author) / NOMURA TAKESHI (author)
2016-07-11
Patent
Electronic Resource
Japanese
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