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Piezoelectric film, ferroelectric ceramics and inspection method of piezoelectric film
To obtain a piezoelectric film having excellent piezoelectric properties. An aspect of the present invention is a piezoelectric film having a crystal oriented in the c-axis direction and a crystal oriented in the a-axis direction, in which, when denoting the amount of a (004) component of the crystal oriented in the c-axis direction by C and denoting the amount of a (400) component of the crystal oriented in the a-axis direction by A, the piezoelectric film satisfies a formula 1 below. C/(A+C)≧0.1 formula 1
Piezoelectric film, ferroelectric ceramics and inspection method of piezoelectric film
To obtain a piezoelectric film having excellent piezoelectric properties. An aspect of the present invention is a piezoelectric film having a crystal oriented in the c-axis direction and a crystal oriented in the a-axis direction, in which, when denoting the amount of a (004) component of the crystal oriented in the c-axis direction by C and denoting the amount of a (400) component of the crystal oriented in the a-axis direction by A, the piezoelectric film satisfies a formula 1 below. C/(A+C)≧0.1 formula 1
Piezoelectric film, ferroelectric ceramics and inspection method of piezoelectric film
KIJIMA TAKESHI (author) / HONDA YUUJI (author) / TANI YUKINORI (author)
2017-09-26
Patent
Electronic Resource
English
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