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OXIDE SINTERED BODY AND OXIDE TRANSPARENT CONDUCTIVE FILM
PROBLEM TO BE SOLVED: To provide an oxide sintered body which can achieve a sufficiently low resistivity even in a production process in which a maximum temperature in a process of forming a film or producing an element is reduced to a low temperature, and an oxide transparent conductive film obtained from the oxide sintered body.SOLUTION: The oxide sintered body includes indium, zirconium, scandium, and oxygen as constituent elements. In the oxide sintered body, by atomic ratio, Zr/(In+Zr+Sc) is 0.1 to 3.0 at%, and Sc/(In+Zr+Sc) is 0.005 to 0.5 at% on the assumption that indium, zirconium, and scandium are represented by In, Zr, and Sc, respectively.SELECTED DRAWING: None
【課題】 本発明は成膜や素子製造のプロセスの最高温度を低温に抑えた製造プロセスにおいても十分に低い抵抗率を実現することのできる酸化物焼結体、及びそれにより得られる酸化物透明導電膜を提供することを目的とする。【解決手段】 構成元素として、インジウム、ジルコニウム、スカンジウム及び酸素を有する酸化物焼結体であり、インジウム、ジルコニウム及びスカンジウムをそれぞれＩｎ、Ｚｒ、Ｓｃとしたときに、原子比でＺｒ／（Ｉｎ＋Ｚｒ＋Ｓｃ）が０．１〜３．０ａｔ％であり、Ｓｃ／（Ｉｎ＋Ｚｒ＋Ｓｃ）が０．００５〜０．５ａｔ％であることを特徴とする酸化物焼結体。【選択図】 なし
OXIDE SINTERED BODY AND OXIDE TRANSPARENT CONDUCTIVE FILM
PROBLEM TO BE SOLVED: To provide an oxide sintered body which can achieve a sufficiently low resistivity even in a production process in which a maximum temperature in a process of forming a film or producing an element is reduced to a low temperature, and an oxide transparent conductive film obtained from the oxide sintered body.SOLUTION: The oxide sintered body includes indium, zirconium, scandium, and oxygen as constituent elements. In the oxide sintered body, by atomic ratio, Zr/(In+Zr+Sc) is 0.1 to 3.0 at%, and Sc/(In+Zr+Sc) is 0.005 to 0.5 at% on the assumption that indium, zirconium, and scandium are represented by In, Zr, and Sc, respectively.SELECTED DRAWING: None
【課題】 本発明は成膜や素子製造のプロセスの最高温度を低温に抑えた製造プロセスにおいても十分に低い抵抗率を実現することのできる酸化物焼結体、及びそれにより得られる酸化物透明導電膜を提供することを目的とする。【解決手段】 構成元素として、インジウム、ジルコニウム、スカンジウム及び酸素を有する酸化物焼結体であり、インジウム、ジルコニウム及びスカンジウムをそれぞれＩｎ、Ｚｒ、Ｓｃとしたときに、原子比でＺｒ／（Ｉｎ＋Ｚｒ＋Ｓｃ）が０．１〜３．０ａｔ％であり、Ｓｃ／（Ｉｎ＋Ｚｒ＋Ｓｃ）が０．００５〜０．５ａｔ％であることを特徴とする酸化物焼結体。【選択図】 なし
OXIDE SINTERED BODY AND OXIDE TRANSPARENT CONDUCTIVE FILM
酸化物焼結体及び酸化物透明導電膜
KURAMOCHI TOSHIHITO (author) / AKIIKE RYO (author) / TSUCHIDA HIRONARI (author)
2017-08-31
Patent
Electronic Resource
Japanese
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