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CORDIERITE SINTERED COMPACT, METHOD FOR PRODUCING THE SAME AND COMPOSITE SUBSTRATE
PROBLEM TO BE SOLVED: To provide cordierite sintered compact in which rigidity is increased while maintaining a low thermal expansion efficient of cordierite, and in which the flatness of a polished face is increased as well.SOLUTION: Provided is a cordierite sintered compact essentially consisting of cordierite and containing silicon nitride or silicon carbide. When silicon nitride is taken as the example, cordierite raw material of 60 to 90 vol.% and silicon nitride raw material of 10 to 40 vol.% are weighed so as to be the total of 100 vol.%, and are mixed by a mixer by a pot mill or the like, and the mixture is, if required, dried by a spray drier to obtain mixed raw material powder. The compact obtained by extrusion molding or sheet molding is fired to produce a cordierite sintered compact. As the cordierite sintered compact, the one in which a thermal expansion coefficient at 40 to 400°C being below 2.4 ppm/°C, open porosity being 0.5% or lower and the average crystal grain size being 1 μm or lower can be obtained.SELECTED DRAWING: Figure 1
【課題】コージェライト質焼結体において，コージェライトの低い熱膨張係数を維持したまま剛性を高くすると共に研磨面の平坦性を高くする。【解決手段】コージェライト質焼結体は、コージェライトを主成分とし、窒化珪素又は炭化珪素を含むものである。窒化珪素を例に取ると、コージェライト原料６０〜９０体積％と窒化珪素原料１０〜４０体積％とを合計１００体積％となるように秤量し、ポットミル等の混合機で混合し、必要に応じてスプレードライヤーで乾燥して混合原料粉末を得る。押出し成形や、シート成形にて得られた成形体を焼成してコージェライト質焼結体を作製する。このコージェライト質焼結体は、４０〜４００℃の熱膨張係数が２．４ｐｐｍ／℃未満であり、開気孔率が０．５％以下であり、平均結晶粒径が１μｍ以下のものが得られる。【選択図】図１
CORDIERITE SINTERED COMPACT, METHOD FOR PRODUCING THE SAME AND COMPOSITE SUBSTRATE
PROBLEM TO BE SOLVED: To provide cordierite sintered compact in which rigidity is increased while maintaining a low thermal expansion efficient of cordierite, and in which the flatness of a polished face is increased as well.SOLUTION: Provided is a cordierite sintered compact essentially consisting of cordierite and containing silicon nitride or silicon carbide. When silicon nitride is taken as the example, cordierite raw material of 60 to 90 vol.% and silicon nitride raw material of 10 to 40 vol.% are weighed so as to be the total of 100 vol.%, and are mixed by a mixer by a pot mill or the like, and the mixture is, if required, dried by a spray drier to obtain mixed raw material powder. The compact obtained by extrusion molding or sheet molding is fired to produce a cordierite sintered compact. As the cordierite sintered compact, the one in which a thermal expansion coefficient at 40 to 400°C being below 2.4 ppm/°C, open porosity being 0.5% or lower and the average crystal grain size being 1 μm or lower can be obtained.SELECTED DRAWING: Figure 1
【課題】コージェライト質焼結体において，コージェライトの低い熱膨張係数を維持したまま剛性を高くすると共に研磨面の平坦性を高くする。【解決手段】コージェライト質焼結体は、コージェライトを主成分とし、窒化珪素又は炭化珪素を含むものである。窒化珪素を例に取ると、コージェライト原料６０〜９０体積％と窒化珪素原料１０〜４０体積％とを合計１００体積％となるように秤量し、ポットミル等の混合機で混合し、必要に応じてスプレードライヤーで乾燥して混合原料粉末を得る。押出し成形や、シート成形にて得られた成形体を焼成してコージェライト質焼結体を作製する。このコージェライト質焼結体は、４０〜４００℃の熱膨張係数が２．４ｐｐｍ／℃未満であり、開気孔率が０．５％以下であり、平均結晶粒径が１μｍ以下のものが得られる。【選択図】図１
CORDIERITE SINTERED COMPACT, METHOD FOR PRODUCING THE SAME AND COMPOSITE SUBSTRATE
コージェライト質焼結体、その製法及び複合基板
ISODA YOSHINORI (author) / SUZUKI YOSHIO (author) / INOUE KATSUHIRO (author) / KATSUTA YUJI (author)
2017-10-05
Patent
Electronic Resource
Japanese
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