A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
PROBLEM TO BE SOLVED: To provide an electrostatic chuck member in which breakdown is unlikely to occur, and an electrostatic chuck device which comprises the electrostatic chuck member and in which breakdown is unlikely to occur.SOLUTION: The present invention relates to an electrostatic chuck member consisting of a sintered body containing aluminum oxide and silicon carbide as main components. Regarding secondary electrons to be discharged from a surface when an object is irradiated with electrons, when a maximum value of the number of secondary electrons within a range from 2 eV to 10 eV in a correspondence between energy of secondary electrons and the number of secondary electrons having this energy is defined as a peak value, a peak value of secondary electrons in the case where the sintered body is irradiated with electrons is 50% equal to or smaller than a peak value of secondary electrons in a case where a monocrystal corundum is irradiated with electrons.SELECTED DRAWING: Figure 3
【課題】絶縁破壊が起こりにくい静電チャック部材を提供する。また、上記静電チャック部材を備え、絶縁破壊が起こりにくい静電チャック装置を提供する。【解決手段】酸化アルミニウムと炭化ケイ素とを主成分とする焼結体からなり、物体に電子を照射した際に表面から放出される二次電子について、二次電子のエネルギーと、このエネルギーを有する二次電子の数との対応関係における、２ｅＶから１０ｅＶの範囲での二次電子数の最大値をピーク値としたとき、前記焼結体に電子を照射した際の二次電子のピーク値が、単結晶コランダムに電子を照射した際の二次電子のピーク値に対して５０％以下である静電チャック部材。【選択図】図３
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
PROBLEM TO BE SOLVED: To provide an electrostatic chuck member in which breakdown is unlikely to occur, and an electrostatic chuck device which comprises the electrostatic chuck member and in which breakdown is unlikely to occur.SOLUTION: The present invention relates to an electrostatic chuck member consisting of a sintered body containing aluminum oxide and silicon carbide as main components. Regarding secondary electrons to be discharged from a surface when an object is irradiated with electrons, when a maximum value of the number of secondary electrons within a range from 2 eV to 10 eV in a correspondence between energy of secondary electrons and the number of secondary electrons having this energy is defined as a peak value, a peak value of secondary electrons in the case where the sintered body is irradiated with electrons is 50% equal to or smaller than a peak value of secondary electrons in a case where a monocrystal corundum is irradiated with electrons.SELECTED DRAWING: Figure 3
【課題】絶縁破壊が起こりにくい静電チャック部材を提供する。また、上記静電チャック部材を備え、絶縁破壊が起こりにくい静電チャック装置を提供する。【解決手段】酸化アルミニウムと炭化ケイ素とを主成分とする焼結体からなり、物体に電子を照射した際に表面から放出される二次電子について、二次電子のエネルギーと、このエネルギーを有する二次電子の数との対応関係における、２ｅＶから１０ｅＶの範囲での二次電子数の最大値をピーク値としたとき、前記焼結体に電子を照射した際の二次電子のピーク値が、単結晶コランダムに電子を照射した際の二次電子のピーク値に対して５０％以下である静電チャック部材。【選択図】図３
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
静電チャック部材、静電チャック装置
KUGIMOTO HIROKUNI (author) / HIDAKA NOBUHIRO (author)
2017-10-12
Patent
Electronic Resource
Japanese
| European Patent Office | 2023
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
| European Patent Office | 2023
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
| European Patent Office | 2023
| European Patent Office | 2023
| European Patent Office | 2023