A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
MANUFACTURING METHOD OF OXIDE SINTERED BODY AND OXIDE SINTERED BODY
PROBLEM TO BE SOLVED: To prevent an occurrence of a fracture or a crack in manufacturing an oxide transparent conductive film by a vacuum evaporation method.SOLUTION: A manufacturing method of an oxide sintered body for vacuum evaporation includes: a step 11 of preparing a slurry by adding an aqueous solvent to a mixture of indium oxide powder and molybdenum trioxide powder and then wet-blending; a step S12 of preparing a pelletized powder by drying the slurry; a step S13 of forming the pelletized powder and then sintering in a sintering atmosphere with an oxygen concentration of 30% or more in volume at a predetermined temperature to prepare an oxide sintered body tablet. Indium oxide powder and molybdenum trioxide powder are wet-mixed such that an atomic ratio of molybdenum amount to an indium amount (Mo/In+Mo) is 30at% - 60at%.SELECTED DRAWING: Figure 1
【課題】真空蒸着法により酸化物透明導電膜を製造する際に、割れやクラックの発生を抑制する。【解決手段】真空蒸着用の酸化物焼結体の製造方法であって、酸化インジウム粉と三酸化モリブテン粉の混合物に水系溶媒を加えて湿式調合してスラリーを作製する工程Ｓ１１と、スラリーを乾燥して造粒粉を作製する工程Ｓ１２と、造粒粉を成形してから酸素濃度が体積比で３０％以上である焼成雰囲気中で所定の温度で焼結して酸化物焼結体タブレットを作製する工程Ｓ１３と、を含み、スラリーを作製する際に、モリブデンの量がインジウムに対する原子数比（Ｍｏ／Ｉｎ＋Ｍｏ）で３０ａｔ％〜６０ａｔ％となるように、酸化インジウム粉と三酸化モリブデン粉を湿式調合することを特徴とする。【選択図】図１
MANUFACTURING METHOD OF OXIDE SINTERED BODY AND OXIDE SINTERED BODY
PROBLEM TO BE SOLVED: To prevent an occurrence of a fracture or a crack in manufacturing an oxide transparent conductive film by a vacuum evaporation method.SOLUTION: A manufacturing method of an oxide sintered body for vacuum evaporation includes: a step 11 of preparing a slurry by adding an aqueous solvent to a mixture of indium oxide powder and molybdenum trioxide powder and then wet-blending; a step S12 of preparing a pelletized powder by drying the slurry; a step S13 of forming the pelletized powder and then sintering in a sintering atmosphere with an oxygen concentration of 30% or more in volume at a predetermined temperature to prepare an oxide sintered body tablet. Indium oxide powder and molybdenum trioxide powder are wet-mixed such that an atomic ratio of molybdenum amount to an indium amount (Mo/In+Mo) is 30at% - 60at%.SELECTED DRAWING: Figure 1
【課題】真空蒸着法により酸化物透明導電膜を製造する際に、割れやクラックの発生を抑制する。【解決手段】真空蒸着用の酸化物焼結体の製造方法であって、酸化インジウム粉と三酸化モリブテン粉の混合物に水系溶媒を加えて湿式調合してスラリーを作製する工程Ｓ１１と、スラリーを乾燥して造粒粉を作製する工程Ｓ１２と、造粒粉を成形してから酸素濃度が体積比で３０％以上である焼成雰囲気中で所定の温度で焼結して酸化物焼結体タブレットを作製する工程Ｓ１３と、を含み、スラリーを作製する際に、モリブデンの量がインジウムに対する原子数比（Ｍｏ／Ｉｎ＋Ｍｏ）で３０ａｔ％〜６０ａｔ％となるように、酸化インジウム粉と三酸化モリブデン粉を湿式調合することを特徴とする。【選択図】図１
MANUFACTURING METHOD OF OXIDE SINTERED BODY AND OXIDE SINTERED BODY
酸化物焼結体の製造方法、及び酸化物焼結体
YADA HISATAKA (author) / SATO KEIICHI (author) / SHIRAKI KOTARO (author)
2017-11-24
Patent
Electronic Resource
Japanese
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