A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
OXIDE SINTERED BODY AND MANUFACTURING METHOD OF OXIDE SINTERED BODY
To provide an oxide sintered body that has relatively good plasma resistance and can be manufactured at relatively low cost.SOLUTION: The present invention relates to an oxide sintered body and a method for producing the oxide sintered body, wherein the oxide sintered body contains a conductive mayenite compound, has an average grain size in the range of 5 μm to 40 μm, and a relative density of 98% or more. The inventive manufacturing method of the oxide sintered body comprises the following steps: (1) a step of preparing a calcined powder containing calcium oxide and aluminum oxide in a ratio of 13:6 to 11:8 (molar ratio converted to CaO:Al2O3); (2) a step of placing the object to be processed containing the calcined powder in a container together with a reducing agent, and pressurizing the object to be processed with a press pressure of 50 kgf/cm2 or more; (3) a step of performing a heat treatment while maintaining the object to be processed at a temperature within a range of 1280°C to 1330°C under the reduced pressure in the container.SELECTED DRAWING: Figure 1
【課題】比較的良好な耐プラズマ性を有するとともに、比較的低コストで製造することが可能な酸化物焼結体を提供する。【解決手段】酸化物焼結体であって、導電性マイエナイト化合物を含み、平均結晶粒径が５μｍ～４０μｍの範囲であり、相対密度が９８％以上である、酸化物焼結体。また、酸化物焼結体の製造方法であって、（１）酸化カルシウムと酸化アルミニウムとを、１３：６～１１：８（ＣａＯ：Ａｌ２Ｏ３に換算したモル比）の割合で含む仮焼粉を準備する工程と、（２）前記仮焼粉を含む被処理体を、還元剤とともに容器内に入れ、前記被処理体を５０ｋｇｆ／ｃｍ２以上のプレス圧力で加圧する工程と、（３）前記容器内を減圧した状態で、前記被処理体を１２８０℃～１３３０℃の範囲に保持し、熱処理を実施する工程を有する、製造方法。【選択図】図１
OXIDE SINTERED BODY AND MANUFACTURING METHOD OF OXIDE SINTERED BODY
To provide an oxide sintered body that has relatively good plasma resistance and can be manufactured at relatively low cost.SOLUTION: The present invention relates to an oxide sintered body and a method for producing the oxide sintered body, wherein the oxide sintered body contains a conductive mayenite compound, has an average grain size in the range of 5 μm to 40 μm, and a relative density of 98% or more. The inventive manufacturing method of the oxide sintered body comprises the following steps: (1) a step of preparing a calcined powder containing calcium oxide and aluminum oxide in a ratio of 13:6 to 11:8 (molar ratio converted to CaO:Al2O3); (2) a step of placing the object to be processed containing the calcined powder in a container together with a reducing agent, and pressurizing the object to be processed with a press pressure of 50 kgf/cm2 or more; (3) a step of performing a heat treatment while maintaining the object to be processed at a temperature within a range of 1280°C to 1330°C under the reduced pressure in the container.SELECTED DRAWING: Figure 1
【課題】比較的良好な耐プラズマ性を有するとともに、比較的低コストで製造することが可能な酸化物焼結体を提供する。【解決手段】酸化物焼結体であって、導電性マイエナイト化合物を含み、平均結晶粒径が５μｍ～４０μｍの範囲であり、相対密度が９８％以上である、酸化物焼結体。また、酸化物焼結体の製造方法であって、（１）酸化カルシウムと酸化アルミニウムとを、１３：６～１１：８（ＣａＯ：Ａｌ２Ｏ３に換算したモル比）の割合で含む仮焼粉を準備する工程と、（２）前記仮焼粉を含む被処理体を、還元剤とともに容器内に入れ、前記被処理体を５０ｋｇｆ／ｃｍ２以上のプレス圧力で加圧する工程と、（３）前記容器内を減圧した状態で、前記被処理体を１２８０℃～１３３０℃の範囲に保持し、熱処理を実施する工程を有する、製造方法。【選択図】図１
OXIDE SINTERED BODY AND MANUFACTURING METHOD OF OXIDE SINTERED BODY
酸化物焼結体および酸化物焼結体の製造方法
OGAWA SHUHEI (author) / MIYAGAWA NAOMICHI (author) / ITO KAZUHIRO (author)
2023-02-15
Patent
Electronic Resource
Japanese
IPC:
C04B
Kalk
,
LIME
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