A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
MANUFACTURING METHOD OF OXIDE SINTERED BODY AND OXIDE SINTERED BODY
PROBLEM TO BE SOLVED: To suppress temporal change of a molybdenum component when an oxide transparent conductive film is manufactured by a vacuum deposition method.SOLUTION: There is provided a manufacturing method of an oxide sintered body for vacuum deposition, comprising: a process S11 of adding an aqueous solvent to a mixture of indium oxide powder and molybdenum trioxide powder and wet blending them to prepare a slurry; a process S12 of drying a slurry to prepare granulated powder; a process S13 of calcinating the granulated powder at 800°C to 1000°C to prepare calcinated powder; a process S14 of dry granulating the calcinated powder to prepare dried granulated powder; and a process S15 of molding the dried granulated powder and sintering the same in a sintering atmosphere with an oxygen concentration of 30 vol.% or more at a temperature of 500°C to 600°C to prepare oxide sintered body tablets, where, when the slurry is prepared, the indium oxide powder and the molybdenum trioxide powder are wet blended so that an amount of molybdenum becomes 20 to 60 at% of indium in terms of atom number ratio (Mo/In+Mo).SELECTED DRAWING: Figure 1
【課題】真空蒸着法で酸化物透明導電膜を製造する際に、モリブテン成分の経時変化を抑制する。【解決手段】真空蒸着用の酸化物焼結体の製造方法であって、酸化インジウム粉と三酸化モリブテン粉の混合物に水系溶媒を加えて湿式調合してスラリーを作製する工程Ｓ１１と、スラリーを乾燥して造粒粉を作製する工程Ｓ１２と、造粒粉を８００℃以上１０００℃以下で仮焼して仮焼粉を作製する工程Ｓ１３と、仮焼粉を乾燥造粒して乾燥造粒粉を作製する工程Ｓ１４と、乾燥造粒粉を成形してから酸素濃度が体積比で３０％以上である焼成雰囲気中で５００℃以上６００℃以下の温度で焼結して酸化物焼結体タブレットを作製する工程Ｓ１５と、を含み、スラリーを作製する際に、モリブデンの量がインジウムに対する原子数比（Ｍｏ／Ｉｎ＋Ｍｏ）で２０〜６０ａｔ％となるように、酸化インジウム粉と三酸化モリブデン粉を湿式調合することを特徴とする。【選択図】図１
MANUFACTURING METHOD OF OXIDE SINTERED BODY AND OXIDE SINTERED BODY
PROBLEM TO BE SOLVED: To suppress temporal change of a molybdenum component when an oxide transparent conductive film is manufactured by a vacuum deposition method.SOLUTION: There is provided a manufacturing method of an oxide sintered body for vacuum deposition, comprising: a process S11 of adding an aqueous solvent to a mixture of indium oxide powder and molybdenum trioxide powder and wet blending them to prepare a slurry; a process S12 of drying a slurry to prepare granulated powder; a process S13 of calcinating the granulated powder at 800°C to 1000°C to prepare calcinated powder; a process S14 of dry granulating the calcinated powder to prepare dried granulated powder; and a process S15 of molding the dried granulated powder and sintering the same in a sintering atmosphere with an oxygen concentration of 30 vol.% or more at a temperature of 500°C to 600°C to prepare oxide sintered body tablets, where, when the slurry is prepared, the indium oxide powder and the molybdenum trioxide powder are wet blended so that an amount of molybdenum becomes 20 to 60 at% of indium in terms of atom number ratio (Mo/In+Mo).SELECTED DRAWING: Figure 1
【課題】真空蒸着法で酸化物透明導電膜を製造する際に、モリブテン成分の経時変化を抑制する。【解決手段】真空蒸着用の酸化物焼結体の製造方法であって、酸化インジウム粉と三酸化モリブテン粉の混合物に水系溶媒を加えて湿式調合してスラリーを作製する工程Ｓ１１と、スラリーを乾燥して造粒粉を作製する工程Ｓ１２と、造粒粉を８００℃以上１０００℃以下で仮焼して仮焼粉を作製する工程Ｓ１３と、仮焼粉を乾燥造粒して乾燥造粒粉を作製する工程Ｓ１４と、乾燥造粒粉を成形してから酸素濃度が体積比で３０％以上である焼成雰囲気中で５００℃以上６００℃以下の温度で焼結して酸化物焼結体タブレットを作製する工程Ｓ１５と、を含み、スラリーを作製する際に、モリブデンの量がインジウムに対する原子数比（Ｍｏ／Ｉｎ＋Ｍｏ）で２０〜６０ａｔ％となるように、酸化インジウム粉と三酸化モリブデン粉を湿式調合することを特徴とする。【選択図】図１
MANUFACTURING METHOD OF OXIDE SINTERED BODY AND OXIDE SINTERED BODY
酸化物焼結体の製造方法、及び酸化物焼結体
SATO KEIICHI (author) / SHIRAKI KOTARO (author) / YADA HISATAKA (author)
2017-12-07
Patent
Electronic Resource
Japanese
OXIDE SINTERED BODY AND MANUFACTURING METHOD OF OXIDE SINTERED BODY
| European Patent Office | 2023
MANUFACTURING METHOD OF OXIDE SINTERED BODY AND OXIDE SINTERED BODY
| European Patent Office | 2017
OXIDE SINTERED BODY AND METHOD FOR PRODUCING OXIDE SINTERED BODY
| European Patent Office | 2023
OXIDE SINTERED BODY AND METHOD FOR PRODUCING OXIDE SINTERED BODY
| European Patent Office | 2021