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ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND HIGH-FREQUENCY TRANSMISSION MATERIAL
PROBLEM TO BE SOLVED: To provide an electrostatic chuck member in which the breakdowns are generated hardly, and to provide an electrostatic chuck device having the above-described electrostatic chuck member, in which the breakdowns are generated hardly at high temperature, and to provide a high-frequency transmission material in which the breakdowns are generated hardly, which is possible to transmit suitably the high frequency wave.SOLUTION: An electrostatic chuck member of which one principal surface is a mounting surface for mounting a tabular sample and which has an electrode for electrostatic attraction includes a plate-like sintered body having the mounting surface, and the electrode for electrostatic attraction on another principal surface of the sintered body or in the sintered body. With respect to a secondary electron emitted from the surface by irradiating an object with an electron, when the maximal value of the number of secondary electron within the range from 2 eV to 10 eV is denoted as a peak value in the relation of correspondence between the secondary electron energy and the number of secondary electron having each energy, the peak value of the secondary electron by irradiating the principal surface with the electron is equal to or less than 50% relative to the peak value of the secondary electron by irradiating a single crystal corundum with the electron.SELECTED DRAWING: None
【課題】絶縁破壊が起こりにくい静電チャック部材を提供する。また、上記静電チャック部材を備え、高温で絶縁破壊が起こりにくい静電チャック装置を提供する。また、絶縁破壊が起こりにくく、好適に高周波を透過させることが可能な高周波透過材料を提供する。【解決手段】一主面が板状試料を載置する載置面であるとともに静電吸着用電極を有する静電チャック部材であって、載置面を有する板状の焼結体と、焼結体の他方の主面または内部に静電吸着用電極を有し、物体に電子を照射した際に表面から放出される二次電子について、二次電子のエネルギーと、各エネルギーを有する二次電子の数との対応関係における２ｅＶから１０ｅＶの範囲での二次電子数の最大値をピーク値としたとき、前記一主面に電子を照射した際の二次電子のピーク値が、単結晶コランダムに電子を照射した際の二次電子のピーク値に対して５０％以下である静電チャック部材。【選択図】なし
ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND HIGH-FREQUENCY TRANSMISSION MATERIAL
PROBLEM TO BE SOLVED: To provide an electrostatic chuck member in which the breakdowns are generated hardly, and to provide an electrostatic chuck device having the above-described electrostatic chuck member, in which the breakdowns are generated hardly at high temperature, and to provide a high-frequency transmission material in which the breakdowns are generated hardly, which is possible to transmit suitably the high frequency wave.SOLUTION: An electrostatic chuck member of which one principal surface is a mounting surface for mounting a tabular sample and which has an electrode for electrostatic attraction includes a plate-like sintered body having the mounting surface, and the electrode for electrostatic attraction on another principal surface of the sintered body or in the sintered body. With respect to a secondary electron emitted from the surface by irradiating an object with an electron, when the maximal value of the number of secondary electron within the range from 2 eV to 10 eV is denoted as a peak value in the relation of correspondence between the secondary electron energy and the number of secondary electron having each energy, the peak value of the secondary electron by irradiating the principal surface with the electron is equal to or less than 50% relative to the peak value of the secondary electron by irradiating a single crystal corundum with the electron.SELECTED DRAWING: None
【課題】絶縁破壊が起こりにくい静電チャック部材を提供する。また、上記静電チャック部材を備え、高温で絶縁破壊が起こりにくい静電チャック装置を提供する。また、絶縁破壊が起こりにくく、好適に高周波を透過させることが可能な高周波透過材料を提供する。【解決手段】一主面が板状試料を載置する載置面であるとともに静電吸着用電極を有する静電チャック部材であって、載置面を有する板状の焼結体と、焼結体の他方の主面または内部に静電吸着用電極を有し、物体に電子を照射した際に表面から放出される二次電子について、二次電子のエネルギーと、各エネルギーを有する二次電子の数との対応関係における２ｅＶから１０ｅＶの範囲での二次電子数の最大値をピーク値としたとき、前記一主面に電子を照射した際の二次電子のピーク値が、単結晶コランダムに電子を照射した際の二次電子のピーク値に対して５０％以下である静電チャック部材。【選択図】なし
ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND HIGH-FREQUENCY TRANSMISSION MATERIAL
静電チャック部材、静電チャック装置および高周波透過材料
KOSAKAI MAMORU (author) / KUGIMOTO HIROKUNI (author) / HIDAKA NOBUHIRO (author)
2018-07-05
Patent
Electronic Resource
Japanese
IPC:
C04B
Kalk
,
LIME
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