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A platform for research: civil engineering, architecture and urbanism
LITHIUM COBALTATE SINTERED BODY, SPUTTERING TARGET PREPARED USING THE SAME, METHOD FOR MANUFACTURING LITHIUM COBALTATE SINTERED BODY AND THIN FILM CONSISTING OF LITHIUM COBALTATE
To provide a sputtering target high in strength and capable of stably sputtering; a lithium cobaltate sintered body used for manufacturing the same; a method for manufacturing them; and a thin film.SOLUTION: The lithium cobaltate sintered body is manufactured by sintering a molding molded by cold press and/or CIP using granulated powder obtained by spray-drying lithium cobaltate slurry to prepare the granulated powder having an average particle size of 20-150 μm at 1000-1100°C in an atmosphere including oxygen of 99 vol% or more. The lithium cobaltate sintered body has a flexural strength of 100 MPa or more, an average bulk resistance of 100 Ωcm or less and a relative density of 90% or more and is cylindrical.SELECTED DRAWING: Figure 1
【課題】強度が高く、安定したスパッタが可能なスパッタリングターゲット、その製造に用いるコバルト酸リチウム焼結体、及びそれらの製造方法並びに薄膜の提供。【解決手段】コバルト酸リチウムスラリーをスプレードライして平均粒径２０〜１５０μｍの造粒粉を作製し、得られた造粒粉を用いてコールドプレス及び／又はＣＩＰにより成型した成型体を、酸素を９９ｖｏｌ％以上含む雰囲気中で１０００〜１１００℃で焼結することによって製造したコバルト酸リチウム焼結体であって、曲げ強さが１００ＭＰａ以上、バルク抵抗の平均値が１００Ω・ｃｍ以下、相対密度が９０％以上、かつ円筒形状であるコバルト酸リチウム焼結体。【選択図】図１
LITHIUM COBALTATE SINTERED BODY, SPUTTERING TARGET PREPARED USING THE SAME, METHOD FOR MANUFACTURING LITHIUM COBALTATE SINTERED BODY AND THIN FILM CONSISTING OF LITHIUM COBALTATE
To provide a sputtering target high in strength and capable of stably sputtering; a lithium cobaltate sintered body used for manufacturing the same; a method for manufacturing them; and a thin film.SOLUTION: The lithium cobaltate sintered body is manufactured by sintering a molding molded by cold press and/or CIP using granulated powder obtained by spray-drying lithium cobaltate slurry to prepare the granulated powder having an average particle size of 20-150 μm at 1000-1100°C in an atmosphere including oxygen of 99 vol% or more. The lithium cobaltate sintered body has a flexural strength of 100 MPa or more, an average bulk resistance of 100 Ωcm or less and a relative density of 90% or more and is cylindrical.SELECTED DRAWING: Figure 1
【課題】強度が高く、安定したスパッタが可能なスパッタリングターゲット、その製造に用いるコバルト酸リチウム焼結体、及びそれらの製造方法並びに薄膜の提供。【解決手段】コバルト酸リチウムスラリーをスプレードライして平均粒径２０〜１５０μｍの造粒粉を作製し、得られた造粒粉を用いてコールドプレス及び／又はＣＩＰにより成型した成型体を、酸素を９９ｖｏｌ％以上含む雰囲気中で１０００〜１１００℃で焼結することによって製造したコバルト酸リチウム焼結体であって、曲げ強さが１００ＭＰａ以上、バルク抵抗の平均値が１００Ω・ｃｍ以下、相対密度が９０％以上、かつ円筒形状であるコバルト酸リチウム焼結体。【選択図】図１
LITHIUM COBALTATE SINTERED BODY, SPUTTERING TARGET PREPARED USING THE SAME, METHOD FOR MANUFACTURING LITHIUM COBALTATE SINTERED BODY AND THIN FILM CONSISTING OF LITHIUM COBALTATE
コバルト酸リチウム焼結体及び該焼結体を用いて作製されるスパッタリングターゲット及びコバルト酸リチウム焼結体の製造方法並びにコバルト酸リチウムからなる薄膜
ENDO YOSUKE (author) / SATO KAZUYUKI (author) / SUZUKI SATORU (author)
2019-01-31
Patent
Electronic Resource
Japanese
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