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CERAMIC MIXTURE, POROUS BODY AND MANUFACTURING METHOD THEREOF, ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF, AND SUBSTRATE FIXING DEVICE
To provide a ceramic mixture capable of reducing a shrinkage ratio before and after firing.SOLUTION: In a paste-like ceramic mixture in which oxide ceramic particles, burning-off particles that burn and disappear at a temperature lower than the firing temperature of the oxide ceramic particles, and a sintering aid are mixed, the volumetric proportion of the burning-off particles with respect to the oxide ceramic particles is greater than 0% and 20% or less.SELECTED DRAWING: Figure 4
【課題】焼成前後での収縮率を低減可能なセラミックス混合物を提供すること。【解決手段】本セラミックス混合物は、酸化物セラミックス粒子、前記酸化物セラミックス粒子の焼成温度よりも低い温度で燃焼して消失する燃焼消失粒子、及び焼成助剤が混合されたペースト状のセラミックス混合物であって、前記酸化物セラミックス粒子に対する前記燃焼消失粒子の体積割合が０％より大きく２０％以下である。【選択図】図４
CERAMIC MIXTURE, POROUS BODY AND MANUFACTURING METHOD THEREOF, ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF, AND SUBSTRATE FIXING DEVICE
To provide a ceramic mixture capable of reducing a shrinkage ratio before and after firing.SOLUTION: In a paste-like ceramic mixture in which oxide ceramic particles, burning-off particles that burn and disappear at a temperature lower than the firing temperature of the oxide ceramic particles, and a sintering aid are mixed, the volumetric proportion of the burning-off particles with respect to the oxide ceramic particles is greater than 0% and 20% or less.SELECTED DRAWING: Figure 4
【課題】焼成前後での収縮率を低減可能なセラミックス混合物を提供すること。【解決手段】本セラミックス混合物は、酸化物セラミックス粒子、前記酸化物セラミックス粒子の焼成温度よりも低い温度で燃焼して消失する燃焼消失粒子、及び焼成助剤が混合されたペースト状のセラミックス混合物であって、前記酸化物セラミックス粒子に対する前記燃焼消失粒子の体積割合が０％より大きく２０％以下である。【選択図】図４
CERAMIC MIXTURE, POROUS BODY AND MANUFACTURING METHOD THEREOF, ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF, AND SUBSTRATE FIXING DEVICE
セラミックス混合物、多孔質体及びその製造方法、静電チャック及びその製造方法、基板固定装置
MINEMURA TOMOTAKE (author)
2019-02-21
Patent
Electronic Resource
Japanese
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