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CERAMIC MIXTURE PASTE, POROUS BODY, ELECTROSTATIC CHUCK, AND SUBSTRATE FIXING DEVICE
A ceramic mixture paste includes oxide ceramic particles, burn-off particles, and a firing aid. The burn-off particles are burned off at a temperature lower than the firing temperature of the oxide ceramic particles. The firing aid melts at a temperature lower than the firing temperature. The ratio of the volume of the burn-off particles to the volume of the oxide ceramic particles is more than 0% and less than or equal to 20%.
CERAMIC MIXTURE PASTE, POROUS BODY, ELECTROSTATIC CHUCK, AND SUBSTRATE FIXING DEVICE
A ceramic mixture paste includes oxide ceramic particles, burn-off particles, and a firing aid. The burn-off particles are burned off at a temperature lower than the firing temperature of the oxide ceramic particles. The firing aid melts at a temperature lower than the firing temperature. The ratio of the volume of the burn-off particles to the volume of the oxide ceramic particles is more than 0% and less than or equal to 20%.
CERAMIC MIXTURE PASTE, POROUS BODY, ELECTROSTATIC CHUCK, AND SUBSTRATE FIXING DEVICE
MINEMURA TOMOTAKE (author)
2019-01-31
Patent
Electronic Resource
English
Ceramic mixture paste, porous body, electrostatic chuck, and substrate fixing device
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