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METHOD OF PRODUCING SINTERED BODY OF CESIUM TUNGSTEN OXIDE, SINTERED BODY OF CESIUM TUNGSTEN OXIDE, AND OXIDE TARGET
To provide a sintered body of cesium tungsten oxide that can be enlarged while resisting fracture, and a method of producing the same.SOLUTION: The method of producing a sintered body of cesium tungsten oxide made from cesium tungsten oxide powder, comprises a weighing process of weighing cesium tungsten oxide powder so that the area of a plate-shaped sintered body of cesium tungsten oxide becomes 100 cmor larger, and a sintering process of sintering cesium tungsten oxide powder by hot pressing or hot static pressing under vacuum or under an inert gas atmosphere, under the following conditions: at a sintering temperature of not lower than 900°C and lower than 1100°C, holding the powder at the maximum temperature for a period of not shorter than 4 hours, at a temperature raising rate up to the maximum temperature of not greater than 7°C/min, at a cooling rate after holding the powder for sintering of not greater than 3°C/min, at a pressure of not lower than 24.5 MPa, at a pressure raising rate of not greater than 1.5 MPa/min, and at a pressure decreasing rate of not greater than 1.5 MPa/min.SELECTED DRAWING: Figure 1
【課題】大型化しても割れを抑制することが可能なセシウムタングステン酸化物焼結体及びその製造方法の提供。【解決手段】セシウムタングステン酸化物の粉末から製造されるセシウムタングステン酸化物焼結体の製造方法であって、秤量工程では、セシウムタングステン酸化物焼結体の面積が、板状で１００ｃｍ２以上となるようにセシウムタングステン酸化物の粉末を秤量し、焼結工程では、セシウムタングステン酸化物の粉末を、真空又は不活性雰囲気下、焼結温度が９００℃以上１１００℃未満、最高温度での保持時間が４時間以上、最高温度までの昇温速度が７℃／ｍｉｎ以下、焼結保持後の冷却速度が３℃／ｍｉｎ以下、２４．５ＭＰａ以上の圧力、昇圧速度１．５ＭＰａ／ｍｉｎ以下、降圧速度１．５ＭＰａ／ｍｉｎ以下の条件でホットプレス又は熱間静圧プレスする。【選択図】図１
METHOD OF PRODUCING SINTERED BODY OF CESIUM TUNGSTEN OXIDE, SINTERED BODY OF CESIUM TUNGSTEN OXIDE, AND OXIDE TARGET
To provide a sintered body of cesium tungsten oxide that can be enlarged while resisting fracture, and a method of producing the same.SOLUTION: The method of producing a sintered body of cesium tungsten oxide made from cesium tungsten oxide powder, comprises a weighing process of weighing cesium tungsten oxide powder so that the area of a plate-shaped sintered body of cesium tungsten oxide becomes 100 cmor larger, and a sintering process of sintering cesium tungsten oxide powder by hot pressing or hot static pressing under vacuum or under an inert gas atmosphere, under the following conditions: at a sintering temperature of not lower than 900°C and lower than 1100°C, holding the powder at the maximum temperature for a period of not shorter than 4 hours, at a temperature raising rate up to the maximum temperature of not greater than 7°C/min, at a cooling rate after holding the powder for sintering of not greater than 3°C/min, at a pressure of not lower than 24.5 MPa, at a pressure raising rate of not greater than 1.5 MPa/min, and at a pressure decreasing rate of not greater than 1.5 MPa/min.SELECTED DRAWING: Figure 1
【課題】大型化しても割れを抑制することが可能なセシウムタングステン酸化物焼結体及びその製造方法の提供。【解決手段】セシウムタングステン酸化物の粉末から製造されるセシウムタングステン酸化物焼結体の製造方法であって、秤量工程では、セシウムタングステン酸化物焼結体の面積が、板状で１００ｃｍ２以上となるようにセシウムタングステン酸化物の粉末を秤量し、焼結工程では、セシウムタングステン酸化物の粉末を、真空又は不活性雰囲気下、焼結温度が９００℃以上１１００℃未満、最高温度での保持時間が４時間以上、最高温度までの昇温速度が７℃／ｍｉｎ以下、焼結保持後の冷却速度が３℃／ｍｉｎ以下、２４．５ＭＰａ以上の圧力、昇圧速度１．５ＭＰａ／ｍｉｎ以下、降圧速度１．５ＭＰａ／ｍｉｎ以下の条件でホットプレス又は熱間静圧プレスする。【選択図】図１
METHOD OF PRODUCING SINTERED BODY OF CESIUM TUNGSTEN OXIDE, SINTERED BODY OF CESIUM TUNGSTEN OXIDE, AND OXIDE TARGET
セシウムタングステン酸化物焼結体の製造方法、セシウムタングステン酸化物焼結体及び酸化物ターゲット
SATO KEIICHI (author)
2019-03-14
Patent
Electronic Resource
Japanese
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