A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
ALUMINA SINTERED BODY AND PRODUCTION METHOD THEREFOR
To provide an alumina sintered body that has corrosion resistance as well as low dielectric loss characteristic and in which a dense membrane can be deposited uniformly, and a production method of the alumina sintered body.SOLUTION: An alumina sintered body according to the present invention is the alumina sintered body with the Al content of 99.8 wt% or more in terms of AlO, in which the content of Si in the alumina sintered body is 170 ppm or more and 600 ppm or less in terms of SiO, the content of Na is 27 ppm or less in terms of NaO, and the alumina sintered body density is 3.96 g/cmor more.SELECTED DRAWING: None
【課題】耐食性を有する共に、低誘電損失特性を有し、また緻密な膜を均一に成膜することができるアルミナ質焼結体、及びそのアルミナ質焼結体の製造方法を提供する。【解決手段】本発明にかかるアルミナ質焼結体は、ＡｌをＡｌ２Ｏ３換算した含有量が９９．８ｗｔ％以上のアルミナ質焼結体であって、前記アルミナ質焼結体中のＳｉをＳｉＯ２換算した含有量が１７０ｐｐｍ以上６００ｐｐｍ以下、ＮａをＮａ２Ｏ換算した含有量が２７ｐｐｍ以下であり、かつ前記アルミナ質焼結体密度が３．９６ｇ／ｃｍ３以上である。【選択図】なし
ALUMINA SINTERED BODY AND PRODUCTION METHOD THEREFOR
To provide an alumina sintered body that has corrosion resistance as well as low dielectric loss characteristic and in which a dense membrane can be deposited uniformly, and a production method of the alumina sintered body.SOLUTION: An alumina sintered body according to the present invention is the alumina sintered body with the Al content of 99.8 wt% or more in terms of AlO, in which the content of Si in the alumina sintered body is 170 ppm or more and 600 ppm or less in terms of SiO, the content of Na is 27 ppm or less in terms of NaO, and the alumina sintered body density is 3.96 g/cmor more.SELECTED DRAWING: None
【課題】耐食性を有する共に、低誘電損失特性を有し、また緻密な膜を均一に成膜することができるアルミナ質焼結体、及びそのアルミナ質焼結体の製造方法を提供する。【解決手段】本発明にかかるアルミナ質焼結体は、ＡｌをＡｌ２Ｏ３換算した含有量が９９．８ｗｔ％以上のアルミナ質焼結体であって、前記アルミナ質焼結体中のＳｉをＳｉＯ２換算した含有量が１７０ｐｐｍ以上６００ｐｐｍ以下、ＮａをＮａ２Ｏ換算した含有量が２７ｐｐｍ以下であり、かつ前記アルミナ質焼結体密度が３．９６ｇ／ｃｍ３以上である。【選択図】なし
ALUMINA SINTERED BODY AND PRODUCTION METHOD THEREFOR
アルミナ質焼結体及びその製造方法
YOSHIDA SAYU (author) / MIYASHITA YUKIHISA (author)
2019-05-09
Patent
Electronic Resource
Japanese
POROUS ALUMINA SINTERED BODY AND PRODUCTION METHOD THEREFOR
| European Patent Office | 2019
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