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MANUFACTURING METHOD OF CONDUCTIVE CARBONIZED SILICON SINTERED BODY AND CONDUCTIVE CARBONIZED SILICON SINTERED BODY
To provide a manufacturing method of a sintered body that is an electric conductive carbonized silicon sintered body containing nitrogen as a dopant and exhibits smaller specific resistance value, that is, exhibits higher electric conductivity.SOLUTION: A manufacturing method of conductive carbonized silicon sintered body comprises: a molded body firing process of firing a molded body formed from a raw material containing aggregate grains to obtain a sintered body having a conductive phase that is a carbonized silicon phase containing nitrogen as a dopant; and a reaction and firing process of firing a silicon source and a carbon source in a non-oxidation atmosphere containing nitrogen gas to react and produce carbonized silicon containing nitrogen as a dopant. In the manufacturing method of conductive carbonized silicon sintered body, the sintered body with different specific resistance value is manufactured by obtaining the aggregate grains through the reaction and firing process, and increasing nitrogen concentration of the aggregate grains by raising the temperature of the reaction firing process.SELECTED DRAWING: Figure 1
【課題】ドーパントとして窒素を含む導電性炭化珪素質焼結体であって、より比抵抗値が小さい、すなわち、より高い導電性を示す焼結体の製造方法を提供する。【解決手段】骨材粒子を含む原料から成形した成形体を焼成し、ドーパントとして窒素を含む炭化珪素の相である導電性相を有する焼結体を得る成形体焼成工程を具備する導電性炭化珪素質焼結体の製造方法において、珪素源と炭素源とを窒素ガスを含む非酸化性雰囲気で焼成することにより、ドーパントとして窒素を含む炭化珪素を反応生成させる反応焼成工程を経て骨材粒子を得ると共に、その反応焼成工程の温度を高めることにより骨材粒子の窒素濃度を増大させることによって、比抵抗値を異ならせた焼結体を製造する。【選択図】図1
MANUFACTURING METHOD OF CONDUCTIVE CARBONIZED SILICON SINTERED BODY AND CONDUCTIVE CARBONIZED SILICON SINTERED BODY
To provide a manufacturing method of a sintered body that is an electric conductive carbonized silicon sintered body containing nitrogen as a dopant and exhibits smaller specific resistance value, that is, exhibits higher electric conductivity.SOLUTION: A manufacturing method of conductive carbonized silicon sintered body comprises: a molded body firing process of firing a molded body formed from a raw material containing aggregate grains to obtain a sintered body having a conductive phase that is a carbonized silicon phase containing nitrogen as a dopant; and a reaction and firing process of firing a silicon source and a carbon source in a non-oxidation atmosphere containing nitrogen gas to react and produce carbonized silicon containing nitrogen as a dopant. In the manufacturing method of conductive carbonized silicon sintered body, the sintered body with different specific resistance value is manufactured by obtaining the aggregate grains through the reaction and firing process, and increasing nitrogen concentration of the aggregate grains by raising the temperature of the reaction firing process.SELECTED DRAWING: Figure 1
【課題】ドーパントとして窒素を含む導電性炭化珪素質焼結体であって、より比抵抗値が小さい、すなわち、より高い導電性を示す焼結体の製造方法を提供する。【解決手段】骨材粒子を含む原料から成形した成形体を焼成し、ドーパントとして窒素を含む炭化珪素の相である導電性相を有する焼結体を得る成形体焼成工程を具備する導電性炭化珪素質焼結体の製造方法において、珪素源と炭素源とを窒素ガスを含む非酸化性雰囲気で焼成することにより、ドーパントとして窒素を含む炭化珪素を反応生成させる反応焼成工程を経て骨材粒子を得ると共に、その反応焼成工程の温度を高めることにより骨材粒子の窒素濃度を増大させることによって、比抵抗値を異ならせた焼結体を製造する。【選択図】図1
MANUFACTURING METHOD OF CONDUCTIVE CARBONIZED SILICON SINTERED BODY AND CONDUCTIVE CARBONIZED SILICON SINTERED BODY
導電性炭化珪素質焼結体の製造方法及び導電性炭化珪素質焼結体
YAMADA TOMOYUKI (author) / SEIKI SUSUMU (author)
2019-10-10
Patent
Electronic Resource
Japanese
IPC:
C04B
Kalk
,
LIME
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