A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING COMPOSITE STRUCTURE, AND DISPLAY MANUFACTURING APPARATUS
To provide a ceramic coat excellent in particle resistance; and to provide a method for evaluating particle resistance of the ceramic coat.SOLUTION: A composite structure includes a substrate, and a structure provided on the substrate, and having a surface. The composite structure in which the structure includes a polycrystalline ceramic, and brightness Sa calculated from its TEM image analysis satisfies a prescribed value, can be used suitably as an internal member of semiconductor manufacturing equipment requiring particle resistance.SELECTED DRAWING: None
【課題】 耐パーティクル性に優れたセラミックコートの提供、およびセラミックコートの耐パーティクル性を評価する方法の提供。【解決手段】 基材と、前記基材上に設けられ、表面を有する構造物とを含む複合構造物であって、構造物が多結晶セラミックスを含んでなり、そのＴＥＭ画像解析から算出される輝度Ｓａが所定の値を満たす複合構造物は、耐パーティクル性が求められる半導体製造装置の内部部材として好適に用いることができる。【選択図】 なし
COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING COMPOSITE STRUCTURE, AND DISPLAY MANUFACTURING APPARATUS
To provide a ceramic coat excellent in particle resistance; and to provide a method for evaluating particle resistance of the ceramic coat.SOLUTION: A composite structure includes a substrate, and a structure provided on the substrate, and having a surface. The composite structure in which the structure includes a polycrystalline ceramic, and brightness Sa calculated from its TEM image analysis satisfies a prescribed value, can be used suitably as an internal member of semiconductor manufacturing equipment requiring particle resistance.SELECTED DRAWING: None
【課題】 耐パーティクル性に優れたセラミックコートの提供、およびセラミックコートの耐パーティクル性を評価する方法の提供。【解決手段】 基材と、前記基材上に設けられ、表面を有する構造物とを含む複合構造物であって、構造物が多結晶セラミックスを含んでなり、そのＴＥＭ画像解析から算出される輝度Ｓａが所定の値を満たす複合構造物は、耐パーティクル性が求められる半導体製造装置の内部部材として好適に用いることができる。【選択図】 なし
COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING COMPOSITE STRUCTURE, AND DISPLAY MANUFACTURING APPARATUS
複合構造物および複合構造物を備えた半導体製造装置並びにディスプレイ製造装置
IWAZAWA JUNICHI (author) / ASHIZAWA HIROAKI (author) / WADA TAKUMA (author) / TAKIZAWA AKIHITO (author) / AOSHIMA TOSHIHIRO (author) / TAKAHASHI YUKI (author) / KANESHIRO ATSUSHI (author)
2020-01-23
Patent
Electronic Resource
Japanese
COMPOSITE STRUCTURE AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING COMPOSITE STRUCTURE
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